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Number of items: 27.

Greiner, Felix (2013):
Mikro-Nano-Integration für metallische Mikrosysteme mit vertikal integrierten Federelementen.
Darmstadt, Technische Universität Darmstadt, In: Institut für Elektromechanische Konstruktionen, 30, [Online-Edition: http://tuprints.ulb.tu-darmstadt.de/3640],
[Ph.D. Thesis]

Greiner, Felix and Quednau, Sebastian and Dassinger, Florian and Sarwar, Reza and Schlaak, Helmut F. and Guttmann, Markus and Meyer, Pascal (2013):
Fertigungstechniken für Multiskalen-3D-Mikrosysteme mit vertikaler Metall-Mikro- und Nanodraht-Integration GMM-Preis 2013.
In: Mikrosystemtechnik Kongress 2013, Aachen, 14.-16- Oktober 2013, [Conference or Workshop Item]

Greiner, Felix and Quednau, Sebastian and Dassinger, Florian (2013):
Fertigungstechniken für Multiskalen-3D-Mikrosysteme - GMM-Preis 2013.
In: Mechatronik, I.G.T. Informationsgesellschaft Technik mbH, pp. 11-13, 121, (10), ISSN 1867-2590,
[Article]

Greiner, Felix and Dassinger, Florian and Quednau, Sebastian and Sarwar, Reza and Hottes, Martin and Stegmann, Christian and Rauber, Markus and Trautmann, Christina and Schlaak, Helmut F. and Ensinger, Wolfgang (2013):
Integration of nanowires onto 100 mm wafers by the growth in-place method.
Darmstadt, In: GSI scientific report 2012, [Online-Edition: https://www.gsi.de/work/forschung/bibliothek_und_dokumentati...],
[Report]

Greiner, Felix and Guttmann, Markus and Meyer, Pascal and Schlaak, Helmut F. (2013):
Fabrication of 3D-MEMS with High Aspect Ratio Micro Wires.
In: Book of Abstracts on 10th International Workshop on High Aspect Ratio Micro and Nano System Technology HARMNST 2013, Berlin, [Conference or Workshop Item]

Greiner, Felix and Quednau, Sebastian and Dassinger, Florian and Sarwar, Reza and Schlaak, Helmut F. and Guttmann, Markus and Meyer, Pascal (2013):
Fabrication techniques of multiscale 3D-MEMS with vertical metal micro- and nanowire integration.
In: Journal of Micromechanics and Microengineering, ISSN 1361-6439,
[Article]

Dassinger, Florian and Quednau, Sebastian and Greiner, Felix and Schlaak, Helmut F. and Hottes, Martin and Stegmann, Christian and Rauber, Markus and Ensinger, Wolfgang and Trautmann, Christina (2012):
Einsatz von integrierten Nanostrukturen in Mikrosystemen.
Berlin, VDE Verlag, In: Mikro-Nano-Integration, 12. - 13. November 2012, [Conference or Workshop Item]

Greiner, Felix and Schlaak, Helmut F. (2012):
Out of Plane High Aspect Ratio Micro Wires as Suspension Elements in Inertial Sensors.
In: Abstract Book 4th ANKA/KNMF Users' Meeting, Karlsruhe, [Online-Edition: http://tuprints.ulb.tu-darmstadt.de/3132/],
[Conference or Workshop Item]

Greiner, Felix
Mohr, Jürgen and Anson, Susan and Schaller, Thomas (eds.) (2012):
Metallic Micro Nailheads MAde by LiG process - MiNiMAL.
Karlsruhe, [Online-Edition: http://www.knmf.kit.edu/302.php],
[Report]

Greiner, Felix and Schlaak, Helmut F. (2012):
High aspect ratio metal micro and nano pillars for minimal footprint MEMS suspension.
In: Microsystem Technologies, Springer Verlag, ISSN 1432-1858,
[Online-Edition: http://www.springerlink.com/content/2g836j7p646t7480/abstrac...],
[Article]

Dassinger, Florian and Hottes, Martin and Greiner, Felix and Schlaak, Helmut F. and Ensinger, Wolfgang (2012):
Mikro-Nano-Integration für die Inertialsensorik.
In: Sensor Magazin, Magazin Verlag Hightech Publications, p. 24, 27, (3), [Online-Edition: http://www.sensormagazin.de/dateien/smonline/redaktion/mikro...],
[Article]

Greiner, Felix and Schlaak, Helmut F. (2012):
Cleanroom Laboratory for Micro- and Nanotechnology.
In: Book of Abstracts on 4th International Target Fabrication Workshop, Mainz, [Online-Edition: http://targetfabrication.com/index.html],
[Conference or Workshop Item]

Greiner, Felix and Schlaak, Helmut F. (2012):
MEMS Made in a Small Scale Research Lab - Opportunities for Functional Targets.
In: Book of Abstracts on 4th International Target Fabrication Workshop, Mainz, [Online-Edition: http://targetfabrication.com/index.html],
[Conference or Workshop Item]

Greiner, Felix and Schlaak, Helmut F. (2012):
Cleanroom Laboratory for Micro- and Nanotechnology.
In: Book of Abstracts on 4th International Target Fabrication Workshop, Mainz, In: 4th International Target Fabrication Workshop, Mainz, [Online-Edition: http://targetfabrication.com/index.html],
[Conference or Workshop Item]

Greiner, Felix and Schlaak, Helmut F. (2012):
MEMS Made in a Small Scale Research Lab - Opportunities for Functional Targets.
In: Book of Abstracts on 4th International Target Fabrication Workshop, Mainz, [Online-Edition: http://targetfabrication.com/index.html],
[Conference or Workshop Item]

Meiss, Thorsten and Rausch, Jacqueline and Rossner, Tim and Greiner, Felix and Werthschützky, Roland (2012):
Sensor mit einfacher Verbindungstechnik.
[Standards, patents]

Winterstein, Thomas and Greiner, Felix and Schlaak, Helmut F. and Pullich, Leif (2012):
A blended-learning concept for basic lectures in electrical engineering: A practical report.
In: International Conference on Education and e-Learning Innovations (ICEELI), 2012, Sousse, 1.-3. Juli 2012, [Online-Edition: http://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=6360...],
[Conference or Workshop Item]

Schlaak, Helmut F. and Greiner, Felix and Schneider, Jörg J. (2012):
Micro Nano Integration – Nano enhanced Microsystems.
In: Microsystems Technology in Germany 2012, pp. 32-33, ISSN 2191-7183,
[Online-Edition: http://www.microsystems-technology-in-germany.de],
[Article]

Greiner, Felix and Haus, Henry and Quednau, Sebastian and Schlaak, Helmut F. and Staab, Matthias and Winterstein, Thomas (2011):
Integrationsorientierte Verfahren zur Herstellung hybrider Mikrosysteme INSIGHT, FKZ 16SV5053.
In: BMBF Schlussbericht, [Online-Edition: http://opac.tib.uni-hannover.de/DB=1/SET=2/TTL=1/CMD?ACT=SRC...],
[Report]

Greiner, Felix and Eberhardt, Johannes and Schlaak, Helmut F. (2011):
Senkrechte metallische Nano- und Mikrodrähte mit hohem Aspektverhältnis als neuartige Federelemente in Mikrosystemen.
In: MikroSystemTechnik Kongress 2011, [Online-Edition: http://www.mikrosystemtechnik-kongress.de],
[Conference or Workshop Item]

Gao, Jing and Müller, Wolfgang F. O. and Greiner, Felix and Eicher, Dirk and Weiland, Thomas and Schlaak, Helmut F.
Schlaak, Helmut F. (ed.) (2011):
Combined Simulation of a Micro Permanent Magnetic Linear Contactless Displacement Sensor.
In: Proceedings of the Mikrosystemtechnik-Kongress 2011, Darmstadt, 10-12 Oktober 2011, VDE-Verlag, pp. 813-816, [Online-Edition: http://www.mikrosystemtechnik-kongress.de],
[Book Section]

Gao, Jing and Müller, Wolfgang F. O. and Greiner, Felix and Eicher, Dirk and Weiland, Thomas and Schlaak, Helmut F. (2010):
Combined Simulation of a Micro Permanent Magnetic Linear Contactless Displacement Sensor.
In: Sensors, pp. 8424-8436, 10, (9), [Article]

Gao, Jing and Müller, Wolfgang F. O. and Greiner, Felix and Eicher, Dirk and Weiland, Thomas and Schlaak, Helmut F.
Wiak, Stawomir and Napieralska-Juszczak, Ewa (eds.) (2010):
Combined Simulation of Micro Permanent Magnetic Linear Contactless Displacement Sensor.
In: Studies in Applied Electromagnetics and Mechanics: Computer Field Models of Electromagnetic Devices, Amsterdam, Netherlands, IOS Press, pp. 861-873, [Book Section]

Gao, Jing and Müller, Wolfgang Franz Otto and Greiner, Felix and Eicher, Dirk and Weiland, Thomas and Schlaak, Helmut F. (2010):
Combined Simulation of Micro Permanent Magnetic Linear Contactless Displacement Sensor.
In: IOS Press, pp. 8425-8436, [Article]

Gao, Jing and Müller, Wolfgang F. O. and Greiner, Felix and Eicher, Dirk and Weiland, Thomas and Schlaak, Helmut F. (2009):
Combined simulation of micro permanent magnetic linear contactless displacement sensor.
In: International Symposium on Electromagnetic Fields, ISEF 2009, Book of digests, ISEF 09, ARRAS (France), [Conference or Workshop Item]

Greiner, Felix (2006):
Analyse und Optimierung des Anschlagverhaltens von piezoelektrischen Aktoren.
Technische Universität Darmstadt, [Diploma Thesis or Magisterarbeit]

Greiner, Felix (2004):
Neuer integrierter Näherungssensor.
Technische Universität Darmstadt, [Seminar paper (Midterm)]

This list was generated on Tue Oct 15 01:26:48 2019 CEST.