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High aspect ratio metal micro and nano pillars for minimal footprint MEMS suspension

Greiner, Felix and Schlaak, Helmut F. (2012):
High aspect ratio metal micro and nano pillars for minimal footprint MEMS suspension.
In: Microsystem Technologies, Springer Verlag, ISSN 1432-1858, [Online-Edition: http://www.springerlink.com/content/2g836j7p646t7480/abstrac...],
[Article]

Item Type: Article
Erschienen: 2012
Creators: Greiner, Felix and Schlaak, Helmut F.
Title: High aspect ratio metal micro and nano pillars for minimal footprint MEMS suspension
Language: English
Journal or Publication Title: Microsystem Technologies
Publisher: Springer Verlag
Divisions: 18 Department of Electrical Engineering and Information Technology
18 Department of Electrical Engineering and Information Technology > Institute for Electromechanical Design
18 Department of Electrical Engineering and Information Technology > Institute for Electromechanical Design > Microtechnology and Electromechanical Systems
Date Deposited: 19 Sep 2012 06:46
Official URL: http://www.springerlink.com/content/2g836j7p646t7480/abstrac...
Identification Number: doi:10.1007/s00542-012-1659-x
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