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Group by: No Grouping | Item Type | Date | Language
Number of items: 27.

Article

Greiner, Felix and Quednau, Sebastian and Dassinger, Florian (2013):
Fertigungstechniken für Multiskalen-3D-Mikrosysteme - GMM-Preis 2013.
121, In: Mechatronik, (10), pp. 11-13. I.G.T. Informationsgesellschaft Technik mbH, ISSN 1867-2590,
[Article]

Greiner, Felix and Quednau, Sebastian and Dassinger, Florian and Sarwar, Reza and Schlaak, Helmut F. and Guttmann, Markus and Meyer, Pascal (2013):
Fabrication techniques of multiscale 3D-MEMS with vertical metal micro- and nanowire integration.
In: Journal of Micromechanics and Microengineering, ISSN 1361-6439,
[Article]

Greiner, Felix and Schlaak, Helmut F. (2012):
High aspect ratio metal micro and nano pillars for minimal footprint MEMS suspension.
In: Microsystem Technologies, Springer Verlag, ISSN 1432-1858,
[Article]

Dassinger, Florian and Hottes, Martin and Greiner, Felix and Schlaak, Helmut F. and Ensinger, Wolfgang (2012):
Mikro-Nano-Integration für die Inertialsensorik.
27, In: Sensor Magazin, (3), p. 24. Magazin Verlag Hightech Publications, [Article]

Schlaak, Helmut F. and Greiner, Felix and Schneider, Jörg J. (2012):
Micro Nano Integration – Nano enhanced Microsystems.
In: Microsystems Technology in Germany 2012, pp. 32-33. ISSN 2191-7183,
[Article]

Gao, Jing and Müller, Wolfgang F. O. and Greiner, Felix and Eicher, Dirk and Weiland, Thomas and Schlaak, Helmut F. (2010):
Combined Simulation of a Micro Permanent Magnetic Linear Contactless Displacement Sensor.
10, In: Sensors, (9), pp. 8424-8436. [Article]

Gao, Jing and Müller, Wolfgang Franz Otto and Greiner, Felix and Eicher, Dirk and Weiland, Thomas and Schlaak, Helmut F. (2010):
Combined Simulation of Micro Permanent Magnetic Linear Contactless Displacement Sensor.
10, In: Sensors, pp. 8425-8436. [Article]

Book Section

Gao, Jing and Müller, Wolfgang F. O. and Greiner, Felix and Eicher, Dirk and Weiland, Thomas and Schlaak, Helmut F. Schlaak, Helmut F. (ed.) (2011):
Combined Simulation of a Micro Permanent Magnetic Linear Contactless Displacement Sensor.
In: Proceedings of the Mikrosystemtechnik-Kongress 2011, Darmstadt, 10-12 Oktober 2011, pp. 813-816, VDE-Verlag, ISBN 978-3-8007-3367-5,
[Book Section]

Gao, Jing and Müller, Wolfgang F. O. and Greiner, Felix and Eicher, Dirk and Weiland, Thomas and Schlaak, Helmut F. Wiak, Stawomir and Napieralska-Juszczak, Ewa (eds.) (2010):
Combined Simulation of Micro Permanent Magnetic Linear Contactless Displacement Sensor.
34, In: Studies in Applied Electromagnetics and Mechanics: Computer Field Models of Electromagnetic Devices, pp. 861-873, Amsterdam, Netherlands, IOS Press, [Book Section]

Conference or Workshop Item

Greiner, Felix and Quednau, Sebastian and Dassinger, Florian and Sarwar, Reza and Schlaak, Helmut F. and Guttmann, Markus and Meyer, Pascal (2013):
Fertigungstechniken für Multiskalen-3D-Mikrosysteme mit vertikaler Metall-Mikro- und Nanodraht-Integration GMM-Preis 2013.
Mikrosystemtechnik Kongress 2013, Aachen, 14.-16- Oktober 2013, [Conference or Workshop Item]

Greiner, Felix and Guttmann, Markus and Meyer, Pascal and Schlaak, Helmut F. (2013):
Fabrication of 3D-MEMS with High Aspect Ratio Micro Wires.
In: Book of Abstracts on 10th International Workshop on High Aspect Ratio Micro and Nano System Technology HARMNST 2013, pp. 19-20,
Berlin, [Conference or Workshop Item]

Dassinger, Florian and Quednau, Sebastian and Greiner, Felix and Schlaak, Helmut F. and Hottes, Martin and Stegmann, Christian and Rauber, Markus and Ensinger, Wolfgang and Trautmann, Christina (2012):
Einsatz von integrierten Nanostrukturen in Mikrosystemen.
Berlin, VDE Verlag, Mikro-Nano-Integration, 12. - 13. November 2012, [Conference or Workshop Item]

Greiner, Felix and Schlaak, Helmut F. (2012):
Out of Plane High Aspect Ratio Micro Wires as Suspension Elements in Inertial Sensors.
In: Abstract Book 4th ANKA/KNMF Users' Meeting,
Karlsruhe, [Conference or Workshop Item]

Greiner, Felix and Schlaak, Helmut F. (2012):
Cleanroom Laboratory for Micro- and Nanotechnology.
In: Book of Abstracts on 4th International Target Fabrication Workshop, p. 100,
Mainz, [Conference or Workshop Item]

Greiner, Felix and Schlaak, Helmut F. (2012):
MEMS Made in a Small Scale Research Lab - Opportunities for Functional Targets.
In: Book of Abstracts on 4th International Target Fabrication Workshop, p. 69,
Mainz, [Conference or Workshop Item]

Greiner, Felix and Schlaak, Helmut F. (2012):
Cleanroom Laboratory for Micro- and Nanotechnology.
In: Book of Abstracts on 4th International Target Fabrication Workshop, p. 100,
Mainz, 4th International Target Fabrication Workshop, Mainz, [Conference or Workshop Item]

Greiner, Felix and Schlaak, Helmut F. (2012):
MEMS Made in a Small Scale Research Lab - Opportunities for Functional Targets.
In: Book of Abstracts on 4th International Target Fabrication Workshop, p. 69,
Mainz, [Conference or Workshop Item]

Winterstein, Thomas and Greiner, Felix and Schlaak, Helmut F. and Pullich, Leif (2012):
A blended-learning concept for basic lectures in electrical engineering: A practical report.
International Conference on Education and e-Learning Innovations (ICEELI), 2012, Sousse, 1.-3. Juli 2012, [Conference or Workshop Item]

Greiner, Felix and Eberhardt, Johannes and Schlaak, Helmut F. (2011):
Senkrechte metallische Nano- und Mikrodrähte mit hohem Aspektverhältnis als neuartige Federelemente in Mikrosystemen.
In: MikroSystemTechnik Kongress 2011, pp. 328-331,
[Conference or Workshop Item]

Gao, Jing and Müller, Wolfgang F. O. and Greiner, Felix and Eicher, Dirk and Weiland, Thomas and Schlaak, Helmut F. (2009):
Combined simulation of micro permanent magnetic linear contactless displacement sensor.
pp. 211-212, International Symposium on Electromagnetic Fields, ISEF 2009, Book of digests, ISEF 09, ARRAS (France), [Conference or Workshop Item]

Report

Greiner, Felix and Dassinger, Florian and Quednau, Sebastian and Sarwar, Reza and Hottes, Martin and Stegmann, Christian and Rauber, Markus and Trautmann, Christina and Schlaak, Helmut F. and Ensinger, Wolfgang (2013):
Integration of nanowires onto 100 mm wafers by the growth in-place method.
In: GSI scientific report 2012, Darmstadt, [Report]

Greiner, Felix Mohr, Jürgen and Anson, Susan and Schaller, Thomas (eds.) (2012):
Metallic Micro Nailheads MAde by LiG process - MiNiMAL.
Karlsruhe, [Report]

Greiner, Felix and Haus, Henry and Quednau, Sebastian and Schlaak, Helmut F. and Staab, Matthias and Winterstein, Thomas (2011):
Integrationsorientierte Verfahren zur Herstellung hybrider Mikrosysteme INSIGHT, FKZ 16SV5053.
In: BMBF Schlussbericht, [Report]

Ph.D. Thesis

Greiner, Felix (2013):
Mikro-Nano-Integration für metallische Mikrosysteme mit vertikal integrierten Federelementen.
In: Institut für Elektromechanische Konstruktionen, 30, Darmstadt, Technische Universität Darmstadt,
[Ph.D. Thesis]

Standards, patents

Meiss, Thorsten and Rausch, Jacqueline and Rossner, Tim and Greiner, Felix and Werthschützky, Roland (2012):
Sensor mit einfacher Verbindungstechnik.
[Standards, patents]

Diploma Thesis or Magisterarbeit

Greiner, Felix (2006):
Analyse und Optimierung des Anschlagverhaltens von piezoelektrischen Aktoren.
Technische Universität Darmstadt, [Diploma Thesis or Magisterarbeit]

Seminar paper (Midterm)

Greiner, Felix (2004):
Neuer integrierter Näherungssensor.
Technische Universität Darmstadt,
[Seminar paper (Midterm)]

This list was generated on Tue Nov 24 00:49:41 2020 CET.