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Micro Nano Integration – Nano enhanced Microsystems

Schlaak, Helmut F. and Greiner, Felix and Schneider, Jörg J. (2012):
Micro Nano Integration – Nano enhanced Microsystems.
In: Microsystems Technology in Germany 2012, pp. 32-33, ISSN 2191-7183, [Online-Edition: http://www.microsystems-technology-in-germany.de],
[Article]

Item Type: Article
Erschienen: 2012
Creators: Schlaak, Helmut F. and Greiner, Felix and Schneider, Jörg J.
Title: Micro Nano Integration – Nano enhanced Microsystems
Language: English
Journal or Publication Title: Microsystems Technology in Germany 2012
Divisions: 18 Department of Electrical Engineering and Information Technology > Institute for Electromechanical Design
18 Department of Electrical Engineering and Information Technology > Institute for Electromechanical Design > Microtechnology and Electromechanical Systems
07 Department of Chemistry > Fachgebiet Anorganische Chemie
18 Department of Electrical Engineering and Information Technology
07 Department of Chemistry
Date Deposited: 13 Mar 2012 08:22
Official URL: http://www.microsystems-technology-in-germany.de
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