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Fabrication techniques of multiscale 3D-MEMS with vertical metal micro- and nanowire integration

Greiner, Felix and Quednau, Sebastian and Dassinger, Florian and Sarwar, Reza and Schlaak, Helmut F. and Guttmann, Markus and Meyer, Pascal (2013):
Fabrication techniques of multiscale 3D-MEMS with vertical metal micro- and nanowire integration.
In: Journal of Micromechanics and Microengineering, ISSN 1361-6439,
[Article]

Item Type: Article
Erschienen: 2013
Creators: Greiner, Felix and Quednau, Sebastian and Dassinger, Florian and Sarwar, Reza and Schlaak, Helmut F. and Guttmann, Markus and Meyer, Pascal
Title: Fabrication techniques of multiscale 3D-MEMS with vertical metal micro- and nanowire integration
Language: English
Journal or Publication Title: Journal of Micromechanics and Microengineering
Divisions: 18 Department of Electrical Engineering and Information Technology
18 Department of Electrical Engineering and Information Technology > Institute for Electromechanical Design (dissolved 18.12.2018)
18 Department of Electrical Engineering and Information Technology > Microtechnology and Electromechanical Systems
Date Deposited: 10 Jan 2013 10:08
Identification Number: doi:10.1088/0960-1317/23/2/025018
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