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MEMS Made in a Small Scale Research Lab - Opportunities for Functional Targets

Greiner, Felix and Schlaak, Helmut F. (2012):
MEMS Made in a Small Scale Research Lab - Opportunities for Functional Targets.
In: Book of Abstracts on 4th International Target Fabrication Workshop, p. 69,
Mainz, [Conference or Workshop Item]

Item Type: Conference or Workshop Item
Erschienen: 2012
Creators: Greiner, Felix and Schlaak, Helmut F.
Title: MEMS Made in a Small Scale Research Lab - Opportunities for Functional Targets
Language: English
Title of Book: Book of Abstracts on 4th International Target Fabrication Workshop
Place of Publication: Mainz
Divisions: 18 Department of Electrical Engineering and Information Technology
18 Department of Electrical Engineering and Information Technology > Institute for Electromechanical Design (dissolved 18.12.2018)
18 Department of Electrical Engineering and Information Technology > Microtechnology and Electromechanical Systems
Date Deposited: 04 Sep 2012 13:13
Official URL: http://targetfabrication.com/index.html
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