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Number of items: 3.

Greiner, Felix ; Quednau, Sebastian ; Dassinger, Florian ; Sarwar, Reza ; Schlaak, Helmut F. ; Guttmann, Markus ; Meyer, Pascal (2013):
Fertigungstechniken für Multiskalen-3D-Mikrosysteme mit vertikaler Metall-Mikro- und Nanodraht-Integration GMM-Preis 2013.
Mikrosystemtechnik Kongress 2013, Aachen, 14.-16- Oktober 2013, [Conference or Workshop Item]

Greiner, Felix ; Guttmann, Markus ; Meyer, Pascal ; Schlaak, Helmut F. (2013):
Fabrication of 3D-MEMS with High Aspect Ratio Micro Wires.
In: Book of Abstracts on 10th International Workshop on High Aspect Ratio Micro and Nano System Technology HARMNST 2013, pp. 19-20,
Berlin, [Conference or Workshop Item]

Greiner, Felix ; Quednau, Sebastian ; Dassinger, Florian ; Sarwar, Reza ; Schlaak, Helmut F. ; Guttmann, Markus ; Meyer, Pascal (2013):
Fabrication techniques of multiscale 3D-MEMS with vertical metal micro- and nanowire integration.
In: Journal of Micromechanics and Microengineering, ISSN 1361-6439,
[Article]

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