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Fabrication of 3D-MEMS with High Aspect Ratio Micro Wires

Greiner, Felix and Guttmann, Markus and Meyer, Pascal and Schlaak, Helmut F. (2013):
Fabrication of 3D-MEMS with High Aspect Ratio Micro Wires.
In: Book of Abstracts on 10th International Workshop on High Aspect Ratio Micro and Nano System Technology HARMNST 2013, Berlin, [Conference or Workshop Item]

Item Type: Conference or Workshop Item
Erschienen: 2013
Creators: Greiner, Felix and Guttmann, Markus and Meyer, Pascal and Schlaak, Helmut F.
Title: Fabrication of 3D-MEMS with High Aspect Ratio Micro Wires
Language: English
Title of Book: Book of Abstracts on 10th International Workshop on High Aspect Ratio Micro and Nano System Technology HARMNST 2013
Place of Publication: Berlin
Divisions: 18 Department of Electrical Engineering and Information Technology
18 Department of Electrical Engineering and Information Technology > Institute for Electromechanical Design
18 Department of Electrical Engineering and Information Technology > Institute for Electromechanical Design > Microtechnology and Electromechanical Systems
Date Deposited: 15 Jul 2013 07:35
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