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Integrationsorientierte Verfahren zur Herstellung hybrider Mikrosysteme INSIGHT, FKZ 16SV5053

Greiner, Felix and Haus, Henry and Quednau, Sebastian and Schlaak, Helmut F. and Staab, Matthias and Winterstein, Thomas (2011):
Integrationsorientierte Verfahren zur Herstellung hybrider Mikrosysteme INSIGHT, FKZ 16SV5053.
In: BMBF Schlussbericht, [Report]

Item Type: Report
Erschienen: 2011
Creators: Greiner, Felix and Haus, Henry and Quednau, Sebastian and Schlaak, Helmut F. and Staab, Matthias and Winterstein, Thomas
Title: Integrationsorientierte Verfahren zur Herstellung hybrider Mikrosysteme INSIGHT, FKZ 16SV5053
Language: German
Series Name: BMBF Schlussbericht
Divisions: 18 Department of Electrical Engineering and Information Technology
18 Department of Electrical Engineering and Information Technology > Institute for Electromechanical Design (dissolved 18.12.2018)
18 Department of Electrical Engineering and Information Technology > Microtechnology and Electromechanical Systems
Date Deposited: 09 Jan 2012 07:11
Official URL: http://opac.tib.uni-hannover.de/DB=1/SET=2/TTL=1/CMD?ACT=SRC...
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