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Fertigungstechniken für Multiskalen-3D-Mikrosysteme - GMM-Preis 2013

Greiner, Felix and Quednau, Sebastian and Dassinger, Florian (2013):
Fertigungstechniken für Multiskalen-3D-Mikrosysteme - GMM-Preis 2013.
In: Mechatronik, I.G.T. Informationsgesellschaft Technik mbH, pp. 11-13, 121, (10), ISSN 1867-2590, [Article]

Item Type: Article
Erschienen: 2013
Creators: Greiner, Felix and Quednau, Sebastian and Dassinger, Florian
Title: Fertigungstechniken für Multiskalen-3D-Mikrosysteme - GMM-Preis 2013
Language: German
Journal or Publication Title: Mechatronik
Volume: 121
Number: 10
Publisher: I.G.T. Informationsgesellschaft Technik mbH
Divisions: 18 Department of Electrical Engineering and Information Technology
18 Department of Electrical Engineering and Information Technology > Institute for Electromechanical Design
18 Department of Electrical Engineering and Information Technology > Institute for Electromechanical Design > Microtechnology and Electromechanical Systems
Date Deposited: 07 Jan 2014 06:49
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