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Einsatz von integrierten Nanostrukturen in Mikrosystemen

Dassinger, Florian ; Quednau, Sebastian ; Greiner, Felix ; Schlaak, Helmut F. ; Hottes, Martin ; Stegmann, Christian ; Rauber, Markus ; Ensinger, Wolfgang ; Trautmann, Christina (2012):
Einsatz von integrierten Nanostrukturen in Mikrosystemen.
Berlin, VDE Verlag, Mikro-Nano-Integration, 12. - 13. November 2012, [Conference or Workshop Item]

Item Type: Conference or Workshop Item
Erschienen: 2012
Creators: Dassinger, Florian ; Quednau, Sebastian ; Greiner, Felix ; Schlaak, Helmut F. ; Hottes, Martin ; Stegmann, Christian ; Rauber, Markus ; Ensinger, Wolfgang ; Trautmann, Christina
Title: Einsatz von integrierten Nanostrukturen in Mikrosystemen
Language: German
Place of Publication: Berlin
Publisher: VDE Verlag
Divisions: 11 Department of Materials and Earth Sciences
11 Department of Materials and Earth Sciences > Material Science
11 Department of Materials and Earth Sciences > Material Science > Material Analytics
18 Department of Electrical Engineering and Information Technology
18 Department of Electrical Engineering and Information Technology > Institute for Electromechanical Design (dissolved 18.12.2018)
18 Department of Electrical Engineering and Information Technology > Microtechnology and Electromechanical Systems
Event Title: Mikro-Nano-Integration
Event Dates: 12. - 13. November 2012
Date Deposited: 22 Jan 2013 10:47
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