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Einsatz von integrierten Nanostrukturen in Mikrosystemen

Dassinger, Florian and Quednau, Sebastian and Greiner, Felix and Schlaak, Helmut F. and Hottes, Martin and Stegmann, Christian and Rauber, Markus and Ensinger, Wolfgang and Trautmann, Christina :
Einsatz von integrierten Nanostrukturen in Mikrosystemen.
In: Mikro-Nano-Integration, 12. - 13. November 2012. VDE Verlag , Berlin
[Conference or Workshop Item] , (2012)

Item Type: Conference or Workshop Item
Erschienen: 2012
Creators: Dassinger, Florian and Quednau, Sebastian and Greiner, Felix and Schlaak, Helmut F. and Hottes, Martin and Stegmann, Christian and Rauber, Markus and Ensinger, Wolfgang and Trautmann, Christina
Title: Einsatz von integrierten Nanostrukturen in Mikrosystemen
Language: German
Place of Publication: Berlin
Publisher: VDE Verlag
Divisions: 11 Department of Materials and Earth Sciences
11 Department of Materials and Earth Sciences > Material Science
11 Department of Materials and Earth Sciences > Material Science > Material Analytics
18 Department of Electrical Engineering and Information Technology
18 Department of Electrical Engineering and Information Technology > Institute for Electromechanical Design
18 Department of Electrical Engineering and Information Technology > Institute for Electromechanical Design > Microtechnology and Electromechanical Systems
Event Title: Mikro-Nano-Integration
Event Dates: 12. - 13. November 2012
Date Deposited: 22 Jan 2013 10:47
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