Dassinger, Florian and Hottes, Martin and Greiner, Felix and Schlaak, Helmut F. and Ensinger, Wolfgang
:
Mikro-Nano-Integration für die Inertialsensorik.
[Online-Edition: http://www.sensormagazin.de/dateien/smonline/redaktion/mikro...]
In:
Sensor Magazin, 27
(3)
p. 24.
[Article]
, (2012)
| Item Type: | Article |
|---|---|
| Erschienen: | 2012 |
| Creators: | Dassinger, Florian and Hottes, Martin and Greiner, Felix and Schlaak, Helmut F. and Ensinger, Wolfgang |
| Title: | Mikro-Nano-Integration für die Inertialsensorik |
| Language: | German |
| Journal or Publication Title: | Sensor Magazin |
| Volume: | 27 |
| Number: | 3 |
| Publisher: | Magazin Verlag Hightech Publications |
| Divisions: | 11 Department of Materials and Earth Sciences 11 Department of Materials and Earth Sciences > Material Science 11 Department of Materials and Earth Sciences > Material Science > Material Analytics 18 Department of Electrical Engineering and Information Technology 18 Department of Electrical Engineering and Information Technology > Institute for Electromechanical Design 18 Department of Electrical Engineering and Information Technology > Institute for Electromechanical Design > Microtechnology and Electromechanical Systems |
| Date Deposited: | 04 Oct 2012 07:15 |
| Official URL: | http://www.sensormagazin.de/dateien/smonline/redaktion/mikro... |
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