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Mikro-Nano-Integration für die Inertialsensorik

Dassinger, Florian and Hottes, Martin and Greiner, Felix and Schlaak, Helmut F. and Ensinger, Wolfgang (2012):
Mikro-Nano-Integration für die Inertialsensorik.
In: Sensor Magazin, 27 (3), p. 24. Magazin Verlag Hightech Publications, [Article]

Item Type: Article
Erschienen: 2012
Creators: Dassinger, Florian and Hottes, Martin and Greiner, Felix and Schlaak, Helmut F. and Ensinger, Wolfgang
Title: Mikro-Nano-Integration für die Inertialsensorik
Language: German
Journal or Publication Title: Sensor Magazin
Journal volume: 27
Number: 3
Publisher: Magazin Verlag Hightech Publications
Divisions: 11 Department of Materials and Earth Sciences
11 Department of Materials and Earth Sciences > Material Science
11 Department of Materials and Earth Sciences > Material Science > Material Analytics
18 Department of Electrical Engineering and Information Technology
18 Department of Electrical Engineering and Information Technology > Institute for Electromechanical Design (dissolved 18.12.2018)
18 Department of Electrical Engineering and Information Technology > Microtechnology and Electromechanical Systems
Date Deposited: 04 Oct 2012 07:15
Official URL: http://www.sensormagazin.de/dateien/smonline/redaktion/mikro...
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