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Number of items: 9.

Miao, Jianmin and Hartnagel, Hans L. (2003):
High-energy ion implantation : an alternative technology for micromachining 3-dimensional GaAs structures.
Ohne Verlag / Selbstverlag, [Book]

Miao, Jianmin and Tiginyanu, and Hartnagel, (1997):
The characteristics of high-resistance layers produced in n-GaAs using MeV-nitrogen implantation for three-dimensional structuring.
In: Applied physics letters. 70 (1997), No. 7, [Article]

Miao, Jianmin (1996):
Dreidimensionale Mikrostrukturierung von GaAs durch Ionenimplantation für Sensoranwendungen.
Düsseldorf: VDI-Verl., 1996. VI, 129 S.,
Düsseldorf, VDI-Verl, TU Darmstadt, 232, [Ph.D. Thesis]

Miao, Jianmin and Hartnagel, and Weiss, and Wilson, (1995):
Fabrication of free-standing membranes in n-GaAs using MeV nitrogen implantation for sensors.
In: Fall meeting of Materials Research Society <1995, Boston, USA>: Proceedings, [Conference or Workshop Item]

Miao, Jianmin and Rück, and Tinschert, and Hartnagel, (1995):
Herstellung der mikromechanischen Strukturen auf GaAs durch Ionenimplantation für Sensoranwendungen.
In: Industrie und Forschung: Seminar der Gesellschaft für Schwerionenforschung, 1995, Darmstadt, [Conference or Workshop Item]

Miao, Jianmin and Hartnagel, and Weiss, and Wilson, (1995):
Improved free standing membranes in GaAs for sensor applications.
In: Electronics letters. 31 (1995), Nr. 13, S. 1047-1049, [Article]

Miao, Jianmin and Hjort, and Hartnagel, and Schweitz, and Rück, and Tinschert, (1995):
Resonant sensors on thin semi-insulating GaAs membranes.
Piscataway, USA, IEEE, In: International Conference on Solid-State Sensors and Actuators: Transducers '95 <8,1995, Stockholm, Schweden>: Digest of techn. papers. S. 406-407, [Conference or Workshop Item]

Miao, Jianmin and Hartnagel, and Rück, and Fricke, (1995):
The use of ion implantation for micromachining of GaAs for sensor applications.
In: Sensors and actuators A 46-47, Nr. 1-3, S. 30-34, [Article]

Miao, Jianmin and Hartnagel, and Tinschert, and Rück, and Fricke, (1994):
Fabrication of thin semi-insulating GaAs membranes by ion implantation and its application for piezoelectric actuators.
In: Gesellschaft für Schwerionenforschung: Scientific report 1994. - Darmstadt: GSI,1995. S. 185, Darmstadt, GSI, [Book Section]

This list was generated on Tue Aug 20 00:11:32 2019 CEST.