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Number of items: 10.

Miao, Jianmin ; Hartnagel, Hans L. (2003)
High-energy ion implantation : an alternative technology for micromachining 3-dimensional GaAs structures.
Book, Bibliographie

Miao, Jianmin ; Tiginyanu, I. M. ; Hartnagel, Hans L. (1997)
The characteristics of high-resistance layers produced in n-GaAs using MeV-nitrogen implantation for three-dimensional structuring.
In: Applied Physics Letters, 70 (7)
doi: 10.1063/1.118222
Article, Bibliographie

Miao, Jianmin (1996)
Dreidimensionale Mikrostrukturierung von GaAs durch Ionenimplantation für Sensoranwendungen.
Technische Universität Darmstadt
Ph.D. Thesis, Bibliographie

Dumka, Deep C. ; Riemenschneider, Rolf ; Miao, Jianmin ; Hartnagel, Hans L. ; Singh, Babu R. (1996)
Electrochemically fabricated high-barrier Schottky contacts on n-InP and their application for metal-semiconductor-metal photodetectors.
In: Journal of The Electrochemical Society, 143 (6)
doi: 10.1149/1.1836929
Article, Bibliographie

Miao, Jianmin ; Hartnagel, Hans L. ; Weiss, B. L. ; Wilson, R. J. (1995)
Fabrication of free-standing membranes in n-GaAs using MeV nitrogen implantation for sensors.
Fall meeting of Materials Research Society. Boston, Mass. (November 27–December 1, 1995)
Conference or Workshop Item, Bibliographie

Miao, Jianmin ; Hartnagel, ; Weiss, ; Wilson, (1995)
Improved free standing membranes in GaAs for sensor applications.
In: Electronics letters. 31 (1995), Nr. 13, S. 1047-1049
Article, Bibliographie

Miao, Jianmin ; Hjort, ; Hartnagel, ; Schweitz, ; Rück, ; Tinschert, (1995)
Resonant sensors on thin semi-insulating GaAs membranes.
Conference or Workshop Item, Bibliographie

Miao, Jianmin ; Hartnagel, ; Rück, ; Fricke, (1995)
The use of ion implantation for micromachining of GaAs for sensor applications.
In: Sensors and actuators A 46-47, Nr. 1-3, S. 30-34
Article, Bibliographie

Miao, Jianmin ; Rück, D. M. ; Tinschert, K. ; Hartnagel, Hans L. (1995)
Herstellung der mikromechanischen Strukturen auf GaAs durch Ionenimplantation für Sensoranwendungen.
Industrie und Forschung: Seminar der Gesellschaft für Schwerionenforschung. Darmstadt (1995)
Conference or Workshop Item, Bibliographie

Miao, Jianmin ; Hartnagel, ; Tinschert, ; Rück, (1994)
Fabrication of thin semi-insulating GaAs membranes by ion implantation and its application for piezoelectric actuators.
In: Gesellschaft für Schwerionenforschung: Scientific report 1994
Book Section, Bibliographie

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