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High-energy ion implantation : an alternative technology for micromachining 3-dimensional GaAs structures

Miao, Jianmin ; Hartnagel, Hans L. (2003):
High-energy ion implantation : an alternative technology for micromachining 3-dimensional GaAs structures.
Ohne Verlag / Selbstverlag, [Book]

Item Type: Book
Erschienen: 2003
Creators: Miao, Jianmin ; Hartnagel, Hans L.
Title: High-energy ion implantation : an alternative technology for micromachining 3-dimensional GaAs structures
Language: English
Publisher: Ohne Verlag / Selbstverlag
Divisions: 18 Department of Electrical Engineering and Information Technology
18 Department of Electrical Engineering and Information Technology > Microwave Electronics
Date Deposited: 20 Nov 2008 08:18
License: [undefiniert]
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