Miao, Jianmin ; Hartnagel, ; Weiss, ; Wilson, (1995):
Fabrication of free-standing membranes in n-GaAs using MeV nitrogen implantation for sensors.
In: Fall meeting of Materials Research Society <1995, Boston, USA>: Proceedings, [Conference or Workshop Item]
| Item Type: | Conference or Workshop Item |
|---|---|
| Erschienen: | 1995 |
| Creators: | Miao, Jianmin ; Hartnagel, ; Weiss, ; Wilson, |
| Title: | Fabrication of free-standing membranes in n-GaAs using MeV nitrogen implantation for sensors |
| Language: | English |
| Series: | Fall meeting of Materials Research Society <1995, Boston, USA>: Proceedings |
| Divisions: | 18 Department of Electrical Engineering and Information Technology 18 Department of Electrical Engineering and Information Technology > Microwave Electronics |
| Date Deposited: | 19 Nov 2008 15:58 |
| License: | [undefiniert] |
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