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Fabrication of free-standing membranes in n-GaAs using MeV nitrogen implantation for sensors

Miao, Jianmin and Hartnagel, and Weiss, and Wilson, (1995):
Fabrication of free-standing membranes in n-GaAs using MeV nitrogen implantation for sensors.
In: Fall meeting of Materials Research Society <1995, Boston, USA>: Proceedings, [Conference or Workshop Item]

Item Type: Conference or Workshop Item
Erschienen: 1995
Creators: Miao, Jianmin and Hartnagel, and Weiss, and Wilson,
Title: Fabrication of free-standing membranes in n-GaAs using MeV nitrogen implantation for sensors
Language: English
Series Name: Fall meeting of Materials Research Society <1995, Boston, USA>: Proceedings
Divisions: 18 Department of Electrical Engineering and Information Technology
18 Department of Electrical Engineering and Information Technology > Microwave Electronics
Date Deposited: 19 Nov 2008 15:58
License: [undefiniert]
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