Miao, Jianmin ; Hartnagel, Hans L. ; Weiss, B. L. ; Wilson, R. J. (1995)
Fabrication of free-standing membranes in n-GaAs using MeV nitrogen implantation for sensors.
Fall meeting of Materials Research Society. Boston, Mass. (27.11.1995-01.12.1995)
Konferenzveröffentlichung, Bibliographie

Miao, Jianmin ; Hartnagel, Hans L. ; Weiss, B. L. ; Wilson, R. J. (1995)
Improved free standing membranes in GaAs for sensor applications.
In: Electronics Letters, 31 (13)
Artikel, Bibliographie