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Fabrication of thin semi-insulating GaAs membranes by ion implantation and its application for piezoelectric actuators

Miao, Jianmin and Hartnagel, and Tinschert, and Rück, and Fricke, (1994):
Fabrication of thin semi-insulating GaAs membranes by ion implantation and its application for piezoelectric actuators.
In: Gesellschaft für Schwerionenforschung: Scientific report 1994. - Darmstadt: GSI,1995. S. 185, Darmstadt, GSI, [Book Section]

Item Type: Book Section
Erschienen: 1994
Creators: Miao, Jianmin and Hartnagel, and Tinschert, and Rück, and Fricke,
Title: Fabrication of thin semi-insulating GaAs membranes by ion implantation and its application for piezoelectric actuators
Language: English
Title of Book: Gesellschaft für Schwerionenforschung: Scientific report 1994. - Darmstadt: GSI,1995. S. 185
Place of Publication: Darmstadt
Publisher: GSI
Divisions: 18 Department of Electrical Engineering and Information Technology
18 Department of Electrical Engineering and Information Technology > Microwave Electronics
Date Deposited: 19 Nov 2008 15:54
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