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Resonant sensors on thin semi-insulating GaAs membranes

Miao, Jianmin and Hjort, and Hartnagel, and Schweitz, and Rück, and Tinschert, (1995):
Resonant sensors on thin semi-insulating GaAs membranes.
In: International Conference on Solid-State Sensors and Actuators: Transducers '95 <8,1995, Stockholm, Schweden>: Digest of techn. papers. S. 406-407, Piscataway, USA: IEEE, 1995,
Piscataway, USA, IEEE, [Conference or Workshop Item]

Item Type: Conference or Workshop Item
Erschienen: 1995
Creators: Miao, Jianmin and Hjort, and Hartnagel, and Schweitz, and Rück, and Tinschert,
Title: Resonant sensors on thin semi-insulating GaAs membranes
Language: English
Series Name: International Conference on Solid-State Sensors and Actuators: Transducers '95 <8,1995, Stockholm, Schweden>: Digest of techn. papers. S. 406-407
Place of Publication: Piscataway, USA
Publisher: IEEE
Edition: Piscataway, USA: IEEE, 1995
Divisions: 18 Department of Electrical Engineering and Information Technology
18 Department of Electrical Engineering and Information Technology > Microwave Electronics
Date Deposited: 19 Nov 2008 15:58
License: [undefiniert]
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