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The use of ion implantation for micromachining of GaAs for sensor applications

Miao, Jianmin and Hartnagel, and Rück, and Fricke, (1995):
The use of ion implantation for micromachining of GaAs for sensor applications.
In: Sensors and actuators A 46-47, Nr. 1-3, S. 30-34, [Article]

Item Type: Article
Erschienen: 1995
Creators: Miao, Jianmin and Hartnagel, and Rück, and Fricke,
Title: The use of ion implantation for micromachining of GaAs for sensor applications
Language: English
Journal or Publication Title: Sensors and actuators A 46-47, Nr. 1-3, S. 30-34
Divisions: 18 Department of Electrical Engineering and Information Technology
18 Department of Electrical Engineering and Information Technology > Microwave Electronics
Date Deposited: 20 Nov 2008 08:28
License: [undefiniert]
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