Miao, Jianmin ; Hartnagel, Hans L. ; Rück, D. ; Fricke, K. (1995)
The use of ion implantation for micromachining of GaAs for sensor applications.
In: Sensors and Actuators A : Physical, 46 (1/3)
doi: 10.1016/0924-4247(94)00855-C
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