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Number of items: 5.

Zhou, Yanping and Probst, Daniel and Thissen, Andreas and Kroke, Edwin and Riedel, Ralf and Hauser, Ralf and Hoche, Holger and Broszeit, Erhard and Kroll, Peter and Stafast, Herbert (2006):
Hard silicon carbonitride films obtained by RF-plasma-enhanced chemical vapour deposition using the single-source precursor bis(trimethylsilyl)carbodiimide.
In: Journal of the European Ceramic Society, SciVerse, pp. 1325-1335, 26, (8), ISSN 09552219,
[Online-Edition: http://dx.doi.org/10.1016/j.jeurceramsoc.2005.02.004],
[Article]

Probst, Daniel and Hoche, Holger and Zhou, Yanping and Hauser, Ralf and Stelzner, Thomas and Scheerer, Herbert and Broszeit, Erhard and Berger, Christina and Riedel, Ralf and Stafast, Herbert and Kroke, Edwin (2005):
Development of PE-CVD Si/C/N:H films for tribological and corrosive complex-load conditions.
In: Surface and Coatings Technology, Elsevier, pp. 355-359, 200, (1-4), ISSN 02578972,
[Online-Edition: http://dx.doi.org/10.1016/j.surfcoat.2005.02.111],
[Article]

Zhou, Yanping and Probst, Daniel and Thissen, Andreas and Kroke, Edwin and Riedel, Ralf and Hauser, Ralf and Hoche, Holger and Broszeit, Erhard and Kroll, Peter and Stafast, Herbert (2005):
Hard silicon carbonitride films obtained by RF-plasma enhanced chemical vapour deposition using the single source precursor Bis(trimethylsilyl)-carbodiimide.
In: Journal of the European Ceramic Society, pp. 1325-1335, 26, [Article]

Stelzner, Thomas and Arold, M. and Falk, F. and Stafast, Herbert and Probst, Daniel and Hoche, Holger (2005):
Single source precursors for plasma-enhanced CVD of SiCN films, investigated by mass spectrometry.
In: Surface & coatings technology, pp. 372-376, 200, [Article]

Berger, Christina and Broszeit, Erhard and Falk, F. and Hoche, Holger and Kroke, Edwin and Kroll, Peter and Probst, Daniel and Riedel, Ralf and Stafast, Herbert and Uhlitzsch, V. and Zhou, Yanping (2003):
Plasma CVD of Si/C/N : experimental and theoretical results.
In: Chemical vapor deposition XVI and EUROCVD 14 : proceedings of the international symposium ...in Paris, France, April 27-May 2, 2003.- Vol. 1. 2003.- ISBN 1-566-77380-6. - S. 646-652, [Conference or Workshop Item]

This list was generated on Tue Oct 22 01:00:21 2019 CEST.