Probst, Daniel ; Hoche, Holger ; Zhou, Yanping ; Hauser, Ralf ; Stelzner, Thomas ; Scheerer, Herbert ; Broszeit, Erhard ; Berger, Christina ; Riedel, Ralf ; Stafast, Herbert ; Kroke, Edwin (2005)
Development of PE-CVD Si/C/N:H films for tribological and corrosive complex-load conditions.
In: Surface and Coatings Technology, 200 (1-4)
doi: 10.1016/j.surfcoat.2005.02.111
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Stelzner, Thomas ; Arold, M. ; Falk, F. ; Stafast, Herbert ; Probst, Daniel ; Hoche, Holger (2005)
Single source precursors for plasma-enhanced CVD of SiCN films, investigated by mass spectrometry.
In: Surface & coatings technology, 200
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