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Development of PE-CVD Si/C/N:H films for tribological and corrosive complex-load conditions

Probst, Daniel and Hoche, Holger and Zhou, Yanping and Hauser, Ralf and Stelzner, Thomas and Scheerer, Herbert and Broszeit, Erhard and Berger, Christina and Riedel, Ralf and Stafast, Herbert and Kroke, Edwin (2005):
Development of PE-CVD Si/C/N:H films for tribological and corrosive complex-load conditions.
In: Surface and Coatings Technology, Elsevier, pp. 355-359, 200, (1-4), ISSN 02578972,
[Online-Edition: http://dx.doi.org/10.1016/j.surfcoat.2005.02.111],
[Article]

Abstract

Amorphous Si/C/N:H where synthesized by plasma enhanced chemical vapor deposition (PE-CVD) using the single-source precursors hexamethyldisilazane (HMDS) and bis(trimethylsilyl)carbodiimide (BTSC). The films produced using the HMDS precursor were rich in carbon, while the films synthesized from the BTSC precursor were high in nitrogen content. All films were amorphous and exhibited a similar hardness to SiC or Si3N4. Fundamental properties of the films were determined in tests such as ultra micro-hardness, elastic modulus, thickness and adhesion. To investigate the composition of the films, composition depth profiles were determined by GDOES. The wear behaviour was studied in sliding tests under oscillating motion. To investigate the wear mechanisms, the wear tracks were examined with topographical analysis, REM as well as EDX.

Item Type: Article
Erschienen: 2005
Creators: Probst, Daniel and Hoche, Holger and Zhou, Yanping and Hauser, Ralf and Stelzner, Thomas and Scheerer, Herbert and Broszeit, Erhard and Berger, Christina and Riedel, Ralf and Stafast, Herbert and Kroke, Edwin
Title: Development of PE-CVD Si/C/N:H films for tribological and corrosive complex-load conditions
Language: English
Abstract:

Amorphous Si/C/N:H where synthesized by plasma enhanced chemical vapor deposition (PE-CVD) using the single-source precursors hexamethyldisilazane (HMDS) and bis(trimethylsilyl)carbodiimide (BTSC). The films produced using the HMDS precursor were rich in carbon, while the films synthesized from the BTSC precursor were high in nitrogen content. All films were amorphous and exhibited a similar hardness to SiC or Si3N4. Fundamental properties of the films were determined in tests such as ultra micro-hardness, elastic modulus, thickness and adhesion. To investigate the composition of the films, composition depth profiles were determined by GDOES. The wear behaviour was studied in sliding tests under oscillating motion. To investigate the wear mechanisms, the wear tracks were examined with topographical analysis, REM as well as EDX.

Journal or Publication Title: Surface and Coatings Technology
Volume: 200
Number: 1-4
Publisher: Elsevier
Uncontrolled Keywords: SiCN, PA-CVD, PE-CVD, Mechanical properties, Tribology
Divisions: 11 Department of Materials and Earth Sciences
11 Department of Materials and Earth Sciences > Material Science
11 Department of Materials and Earth Sciences > Material Science > Dispersive Solids
16 Department of Mechanical Engineering
16 Department of Mechanical Engineering > Center for Engineering Materials, State Materials Testing Institute Darmstadt (MPA) Chair and Institute for Materials Technology (IfW)
Date Deposited: 20 Apr 2012 11:22
Official URL: http://dx.doi.org/10.1016/j.surfcoat.2005.02.111
Identification Number: doi:10.1016/j.surfcoat.2005.02.111
Funders: Financial support for the joint research project by the German Research Foundation, DFG (Bonn), in the framework of the priority program 1119 “Inorganic Materials by Gas Phase Synthesis” is gratefully acknowledged.
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