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Plasma CVD of Si/C/N : experimental and theoretical results

Berger, Christina and Broszeit, Erhard and Falk, F. and Hoche, Holger and Kroke, Edwin and Kroll, Peter and Probst, Daniel and Riedel, Ralf and Stafast, Herbert and Uhlitzsch, V. and Zhou, Yanping (2003):
Plasma CVD of Si/C/N : experimental and theoretical results.
In: Chemical vapor deposition XVI and EUROCVD 14 : proceedings of the international symposium ...in Paris, France, April 27-May 2, 2003.- Vol. 1. 2003.- ISBN 1-566-77380-6. - S. 646-652, [Conference or Workshop Item]

Abstract

Amorphous and crystalline silicon carbonitride materials have attracted great interest in recent years[1] due to outstanding oxidation resistance at elevated temperatures[2], high hardness[3] as well as excellent wear characteristics[4]. This study is focused on the synthesis of Si/C/N hard coatings on metal substrates for tribological applications. It is based on an interdisciplinary cooperation between four research institutes. Starting from single-source precursors, coatings were prepared using very similar PECVD devices at IPHT Jena and IFMS Darmstadt (Figs. 1 and 2). At Jena the CVD process is experimentally examined by laser assisted in situ mass spectrometry (Fig. 2). Quantum-theoretical calculations are used at RWTH Aachen in order to examine the species in the gas phase as well as surface reactions with the substrate and solid state structure-property relations. The mechanical and tribological characteristics important for industrial applications of the coatings and coatingsubstrate composites as well as the oxidation and corrosion behaviour (in particular at high temperatures) are examined at IfW. The overall objective of this joint research project is to gain a comprehensive understanding of the CVD process as a whole. First preliminary results are presented here.

Item Type: Conference or Workshop Item
Erschienen: 2003
Creators: Berger, Christina and Broszeit, Erhard and Falk, F. and Hoche, Holger and Kroke, Edwin and Kroll, Peter and Probst, Daniel and Riedel, Ralf and Stafast, Herbert and Uhlitzsch, V. and Zhou, Yanping
Title: Plasma CVD of Si/C/N : experimental and theoretical results
Language: English
Abstract:

Amorphous and crystalline silicon carbonitride materials have attracted great interest in recent years[1] due to outstanding oxidation resistance at elevated temperatures[2], high hardness[3] as well as excellent wear characteristics[4]. This study is focused on the synthesis of Si/C/N hard coatings on metal substrates for tribological applications. It is based on an interdisciplinary cooperation between four research institutes. Starting from single-source precursors, coatings were prepared using very similar PECVD devices at IPHT Jena and IFMS Darmstadt (Figs. 1 and 2). At Jena the CVD process is experimentally examined by laser assisted in situ mass spectrometry (Fig. 2). Quantum-theoretical calculations are used at RWTH Aachen in order to examine the species in the gas phase as well as surface reactions with the substrate and solid state structure-property relations. The mechanical and tribological characteristics important for industrial applications of the coatings and coatingsubstrate composites as well as the oxidation and corrosion behaviour (in particular at high temperatures) are examined at IfW. The overall objective of this joint research project is to gain a comprehensive understanding of the CVD process as a whole. First preliminary results are presented here.

Series Name: Chemical vapor deposition XVI and EUROCVD 14 : proceedings of the international symposium ...in Paris, France, April 27-May 2, 2003.- Vol. 1. 2003.- ISBN 1-566-77380-6. - S. 646-652
Divisions: 11 Department of Materials and Earth Sciences > Material Science > Dispersive Solids
16 Department of Mechanical Engineering
16 Department of Mechanical Engineering > Center for Engineering Materials, State Materials Testing Institute Darmstadt (MPA) Chair and Institute for Materials Technology (IfW)
11 Department of Materials and Earth Sciences > Material Science
11 Department of Materials and Earth Sciences
Date Deposited: 20 Nov 2008 08:21
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