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Number of items: 5.

Hegemann, Dirk ; Vohrer, U. ; Oehr, C. ; Riedel, Ralf (1999)
Deposition of SiOx films from O2/HMDSO plasmas.
th International Conference on Plasma Surface Engineering (PSE 98). Garmisch-Partenkirchen, GERMANY (SEP 14-18, 1998)
doi: 10.1016/S0257-8972(99)00092-4
Conference or Workshop Item, Bibliographie

Hegemann, Dirk ; Riedel, R. ; Oehr, C. (1999)
PACVD derived thin films in the system Si-B-C-N.
In: Chemical vapor deposition, 5 (2)
Article, Bibliographie

Hegemann, Dirk ; Riedel, Ralf ; Oehr, C. (1999)
Influence of single-source precursors on PACVD-derived boron carbonitride thin films.
In: Thin Solid Films, 339 (1-2)
Article, Bibliographie

Hegemann, Dirk ; Riedel, R. ; Oehr, C. (1999)
Plasma deposition of hard and thermal resistant SiBCN coatings.
Conference or Workshop Item, Bibliographie

Hegemann, Dirk ; Riedel, R. ; Dreßler, W. ; Oehr, C. ; Schindler, B. ; Brunner, H. (1997)
Boron carbonitride thin films by PACVD of single source precursors.
In: Chemical Vapor Deposition, 3 (5)
Article, Bibliographie

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