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Influence of single-source precursors on PACVD-derived boron carbonitride thin films

Hegemann, Dirk ; Riedel, Ralf ; Oehr, C. :
Influence of single-source precursors on PACVD-derived boron carbonitride thin films.
In: Thin solid films, 339 (1-2) pp. 154-159.
[Artikel], (1999)

Kurzbeschreibung (Abstract)

This work investigates the influence of the B/C/N containing single-source precursors pyridine-borane (PB) and triazaborabicyclodecane (TBBD) on the chemical composition of boron carbonitride thin films. The films are deposited via a PACVD process, activated by 13.56 MHz radio frequency (r.f.). N2, Ar and He serve as carrier gases. The chemical compositions of the coatings are analyzed by auger electron spectroscopy and the fragmentation of TBBD by mass spectrometry. It becomes evident, that from a certain bias voltage, the self-bias in capacitively r.f. electrical discharges mainly influences the chemical composition of the BCN films independent of the used precursor.

Typ des Eintrags: Artikel
Erschienen: 1999
Autor(en): Hegemann, Dirk ; Riedel, Ralf ; Oehr, C.
Titel: Influence of single-source precursors on PACVD-derived boron carbonitride thin films
Sprache: Englisch
Kurzbeschreibung (Abstract):

This work investigates the influence of the B/C/N containing single-source precursors pyridine-borane (PB) and triazaborabicyclodecane (TBBD) on the chemical composition of boron carbonitride thin films. The films are deposited via a PACVD process, activated by 13.56 MHz radio frequency (r.f.). N2, Ar and He serve as carrier gases. The chemical compositions of the coatings are analyzed by auger electron spectroscopy and the fragmentation of TBBD by mass spectrometry. It becomes evident, that from a certain bias voltage, the self-bias in capacitively r.f. electrical discharges mainly influences the chemical composition of the BCN films independent of the used precursor.

Titel der Zeitschrift, Zeitung oder Schriftenreihe: Thin solid films
Band: 339
(Heft-)Nummer: 1-2
Verlag: Elsevier
Freie Schlagworte: Boron carbonitride, Pyridine-borane, Triazaborabicyclodecane, r.f. plasma, Self-bias
Fachbereich(e)/-gebiet(e): Fachbereich Material- und Geowissenschaften > Materialwissenschaften > Disperse Feststoffe, Dispersive Solids
Fachbereich Material- und Geowissenschaften > Materialwissenschaften
Fachbereich Material- und Geowissenschaften
Hinterlegungsdatum: 19 Nov 2008 16:23
Sponsoren: R.R. gratefully acknowledges the financial support by the Fonds der Chemischen Industrie, Frankfurt.
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