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Deposition of SiOx films from O2/HMDSO plasmas

Hegemann, Dirk ; Vohrer, U. ; Oehr, C. ; Riedel, R. :
Deposition of SiOx films from O2/HMDSO plasmas.
In: Surface and coatings technology, 116-19 pp. 1033-1036.
[Artikel], (1999)

Kurzbeschreibung (Abstract)

The variation of O2/HMDSO ratio in an r.f. plasma was carried out to optimize SiOx film properties and deposition rates for the coating of polymers. A ratio exceeding 6:1 yields scratch resistant, quartz-like films with low carbon contents. The chemical composition was analyzed to SiO1.8C0.3 by XPS. A compact plasma reactor was developed generating homogeneous plasmas and depositions over large areas (up to 380×290 mm2). Furthermore, the total coverage of three-dimensional formed parts was managed with good adhesion of SiOx films to polymers like PC and PBT to reduce wear.

Typ des Eintrags: Artikel
Erschienen: 1999
Autor(en): Hegemann, Dirk ; Vohrer, U. ; Oehr, C. ; Riedel, R.
Titel: Deposition of SiOx films from O2/HMDSO plasmas
Sprache: Englisch
Kurzbeschreibung (Abstract):

The variation of O2/HMDSO ratio in an r.f. plasma was carried out to optimize SiOx film properties and deposition rates for the coating of polymers. A ratio exceeding 6:1 yields scratch resistant, quartz-like films with low carbon contents. The chemical composition was analyzed to SiO1.8C0.3 by XPS. A compact plasma reactor was developed generating homogeneous plasmas and depositions over large areas (up to 380×290 mm2). Furthermore, the total coverage of three-dimensional formed parts was managed with good adhesion of SiOx films to polymers like PC and PBT to reduce wear.

Titel der Zeitschrift, Zeitung oder Schriftenreihe: Surface and coatings technology
Band: 116-19
Verlag: Elsevier
Freie Schlagworte: Adhesion, R.f. plasma, SiOx films
Fachbereich(e)/-gebiet(e): Fachbereich Material- und Geowissenschaften > Materialwissenschaften > Disperse Feststoffe, Dispersive Solids
Fachbereich Material- und Geowissenschaften > Materialwissenschaften
Fachbereich Material- und Geowissenschaften
Hinterlegungsdatum: 19 Nov 2008 16:20
Sponsoren: Parts of this work were supported by the German Wirtschaftsministerium Baden Württemberg (reference no. 4-4332.62-IGB/1) as well as several industrial partners.
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