Hegemann, Dirk ; Vohrer, U. ; Oehr, C. ; Riedel, Ralf (1999):
Deposition of SiOx films from O2/HMDSO plasmas.
In: SURFACE & COATINGS TECHNOLOGY, 116, pp. 1033-1036, Elsevier Science SA, Switzerland, th International Conference on Plasma Surface Engineering (PSE 98), Garmisch-Partenkirchen, GERMANY, SEP 14-18, 1998, DOI: 10.1016/S0257-8972(99)00092-4,
[Conference or Workshop Item]
Abstract
The variation of O2/HMDSO ratio in an r.f. plasma was carried out to optimize SiOx film properties and deposition rates for the coating of polymers. A ratio exceeding 6:1 yields scratch resistant, quartz-like films with low carbon contents. The chemical composition was analyzed to SiO1.8C0.3 by XPS. A compact plasma reactor was developed generating homogeneous plasmas and depositions over large areas (up to 380×290 mm2). Furthermore, the total coverage of three-dimensional formed parts was managed with good adhesion of SiOx films to polymers like PC and PBT to reduce wear.
| Item Type: | Conference or Workshop Item |
|---|---|
| Erschienen: | 1999 |
| Creators: | Hegemann, Dirk ; Vohrer, U. ; Oehr, C. ; Riedel, Ralf |
| Title: | Deposition of SiOx films from O2/HMDSO plasmas |
| Language: | English |
| Abstract: | The variation of O2/HMDSO ratio in an r.f. plasma was carried out to optimize SiOx film properties and deposition rates for the coating of polymers. A ratio exceeding 6:1 yields scratch resistant, quartz-like films with low carbon contents. The chemical composition was analyzed to SiO1.8C0.3 by XPS. A compact plasma reactor was developed generating homogeneous plasmas and depositions over large areas (up to 380×290 mm2). Furthermore, the total coverage of three-dimensional formed parts was managed with good adhesion of SiOx films to polymers like PC and PBT to reduce wear. |
| Journal or Publication Title: | Surface and coatings technology |
| Series: | SURFACE & COATINGS TECHNOLOGY |
| Series Volume: | 116 |
| Publisher: | Elsevier Science SA, Switzerland |
| Uncontrolled Keywords: | Adhesion, R.f. plasma, SiOx films |
| Divisions: | 11 Department of Materials and Earth Sciences 11 Department of Materials and Earth Sciences > Material Science 11 Department of Materials and Earth Sciences > Material Science > Dispersive Solids |
| Event Title: | th International Conference on Plasma Surface Engineering (PSE 98) |
| Event Location: | Garmisch-Partenkirchen, GERMANY |
| Event Dates: | SEP 14-18, 1998 |
| Date Deposited: | 19 Nov 2008 16:20 |
| DOI: | 10.1016/S0257-8972(99)00092-4 |
| Funders: | Parts of this work were supported by the German Wirtschaftsministerium Baden Württemberg (reference no. 4-4332.62-IGB/1) as well as several industrial partners. |
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