Hegemann, Dirk ; Vohrer, U. ; Oehr, C. ; Riedel, R.
:
Deposition of SiOx films from O2/HMDSO plasmas.
In:
Surface and coatings technology, 116-19
pp. 1033-1036.
[Artikel], (1999)
Kurzbeschreibung (Abstract)
The variation of O2/HMDSO ratio in an r.f. plasma was carried out to optimize SiOx film properties and deposition rates for the coating of polymers. A ratio exceeding 6:1 yields scratch resistant, quartz-like films with low carbon contents. The chemical composition was analyzed to SiO1.8C0.3 by XPS. A compact plasma reactor was developed generating homogeneous plasmas and depositions over large areas (up to 380×290 mm2). Furthermore, the total coverage of three-dimensional formed parts was managed with good adhesion of SiOx films to polymers like PC and PBT to reduce wear.
| Typ des Eintrags: | Artikel |
|---|---|
| Erschienen: | 1999 |
| Autor(en): | Hegemann, Dirk ; Vohrer, U. ; Oehr, C. ; Riedel, R. |
| Titel: | Deposition of SiOx films from O2/HMDSO plasmas |
| Sprache: | Englisch |
| Kurzbeschreibung (Abstract): | The variation of O2/HMDSO ratio in an r.f. plasma was carried out to optimize SiOx film properties and deposition rates for the coating of polymers. A ratio exceeding 6:1 yields scratch resistant, quartz-like films with low carbon contents. The chemical composition was analyzed to SiO1.8C0.3 by XPS. A compact plasma reactor was developed generating homogeneous plasmas and depositions over large areas (up to 380×290 mm2). Furthermore, the total coverage of three-dimensional formed parts was managed with good adhesion of SiOx films to polymers like PC and PBT to reduce wear. |
| Titel der Zeitschrift, Zeitung oder Schriftenreihe: | Surface and coatings technology |
| Band: | 116-19 |
| Verlag: | Elsevier |
| Freie Schlagworte: | Adhesion, R.f. plasma, SiOx films |
| Fachbereich(e)/-gebiet(e): | Fachbereich Material- und Geowissenschaften > Materialwissenschaften > Disperse Feststoffe, Dispersive Solids Fachbereich Material- und Geowissenschaften > Materialwissenschaften Fachbereich Material- und Geowissenschaften |
| Hinterlegungsdatum: | 19 Nov 2008 16:20 |
| Sponsoren: | Parts of this work were supported by the German Wirtschaftsministerium Baden Württemberg (reference no. 4-4332.62-IGB/1) as well as several industrial partners. |
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