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Deposition of SiOx films from O2/HMDSO plasmas

Hegemann, Dirk and Vohrer, U. and Oehr, C. and Riedel, Ralf (1999):
Deposition of SiOx films from O2/HMDSO plasmas.
In: SURFACE & COATINGS TECHNOLOGY, 116, Elsevier Science SA, Switzerland, In: th International Conference on Plasma Surface Engineering (PSE 98), Garmisch-Partenkirchen, GERMANY, SEP 14-18, 1998, pp. 1033-1036, DOI: 10.1016/S0257-8972(99)00092-4,
[Conference or Workshop Item]

Abstract

The variation of O2/HMDSO ratio in an r.f. plasma was carried out to optimize SiOx film properties and deposition rates for the coating of polymers. A ratio exceeding 6:1 yields scratch resistant, quartz-like films with low carbon contents. The chemical composition was analyzed to SiO1.8C0.3 by XPS. A compact plasma reactor was developed generating homogeneous plasmas and depositions over large areas (up to 380×290 mm2). Furthermore, the total coverage of three-dimensional formed parts was managed with good adhesion of SiOx films to polymers like PC and PBT to reduce wear.

Item Type: Conference or Workshop Item
Erschienen: 1999
Creators: Hegemann, Dirk and Vohrer, U. and Oehr, C. and Riedel, Ralf
Title: Deposition of SiOx films from O2/HMDSO plasmas
Language: English
Abstract:

The variation of O2/HMDSO ratio in an r.f. plasma was carried out to optimize SiOx film properties and deposition rates for the coating of polymers. A ratio exceeding 6:1 yields scratch resistant, quartz-like films with low carbon contents. The chemical composition was analyzed to SiO1.8C0.3 by XPS. A compact plasma reactor was developed generating homogeneous plasmas and depositions over large areas (up to 380×290 mm2). Furthermore, the total coverage of three-dimensional formed parts was managed with good adhesion of SiOx films to polymers like PC and PBT to reduce wear.

Journal or Publication Title: Surface and coatings technology
Series Name: SURFACE & COATINGS TECHNOLOGY
Volume: 116
Publisher: Elsevier Science SA, Switzerland
Uncontrolled Keywords: Adhesion, R.f. plasma, SiOx films
Divisions: 11 Department of Materials and Earth Sciences
11 Department of Materials and Earth Sciences > Material Science
11 Department of Materials and Earth Sciences > Material Science > Dispersive Solids
Event Title: th International Conference on Plasma Surface Engineering (PSE 98)
Event Location: Garmisch-Partenkirchen, GERMANY
Event Dates: SEP 14-18, 1998
Date Deposited: 19 Nov 2008 16:20
DOI: 10.1016/S0257-8972(99)00092-4
Funders: Parts of this work were supported by the German Wirtschaftsministerium Baden Württemberg (reference no. 4-4332.62-IGB/1) as well as several industrial partners.
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