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Boron carbonitride thin films by PACVD of single source precursors

Hegemann, Dirk and Riedel, R. and Dreßler, W. and Oehr, C. and Schindler, B. and Brunner, H. (1997):
Boron carbonitride thin films by PACVD of single source precursors.
In: Chemical vapor deposition. 3 (1997), S. 257-262, [Article]

Item Type: Article
Erschienen: 1997
Creators: Hegemann, Dirk and Riedel, R. and Dreßler, W. and Oehr, C. and Schindler, B. and Brunner, H.
Title: Boron carbonitride thin films by PACVD of single source precursors
Language: English
Journal or Publication Title: Chemical vapor deposition. 3 (1997), S. 257-262
Divisions: 11 Department of Materials and Earth Sciences
11 Department of Materials and Earth Sciences > Material Science
11 Department of Materials and Earth Sciences > Material Science > Dispersive Solids
11 Department of Materials and Earth Sciences > Fachbereich Materialwissenschaft (1999 aufgegangen in 11 Fachbereich Material- und Geowissenschaften)
Date Deposited: 19 Nov 2008 16:23
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