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Boron carbonitride thin films by PACVD of single source precursors

Hegemann, Dirk ; Riedel, R. ; Dreßler, W. ; Oehr, C. ; Schindler, B. ; Brunner, H. (1997):
Boron carbonitride thin films by PACVD of single source precursors.
3, In: Chemical Vapor Deposition, (5), WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim, ISSN 0948-1907,
[Article]

Item Type: Article
Erschienen: 1997
Creators: Hegemann, Dirk ; Riedel, R. ; Dreßler, W. ; Oehr, C. ; Schindler, B. ; Brunner, H.
Title: Boron carbonitride thin films by PACVD of single source precursors
Language: English
Journal or Publication Title: Chemical Vapor Deposition
Volume: 3
Number: 5
Publisher: WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
Divisions: 11 Department of Materials and Earth Sciences
11 Department of Materials and Earth Sciences > Material Science
11 Department of Materials and Earth Sciences > Material Science > Dispersive Solids
11 Department of Materials and Earth Sciences > Department of Earth Sciences (1999 merged into Department of Materials and Earth Sciences)
Date Deposited: 19 Nov 2008 16:23
License: [undefiniert]
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