TU Darmstadt / ULB / TUbiblio

Browse by Person

Up a level
Export as [feed] Atom [feed] RSS 1.0 [feed] RSS 2.0
Group by: No Grouping | Item Type | Date | Language
Number of items: 1.

Hegemann, Dirk ; Vohrer, U. ; Oehr, C. ; Riedel, Ralf (1999):
Deposition of SiOx films from O2/HMDSO plasmas.
In: SURFACE & COATINGS TECHNOLOGY, 116, pp. 1033-1036, Elsevier Science SA, Switzerland, th International Conference on Plasma Surface Engineering (PSE 98), Garmisch-Partenkirchen, GERMANY, SEP 14-18, 1998, DOI: 10.1016/S0257-8972(99)00092-4,
[Conference or Workshop Item]

This list was generated on Sat Oct 23 05:28:37 2021 CEST.