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Hegemann, Dirk and Vohrer, U. and Oehr, C. and Riedel, Ralf (1999):
Deposition of SiOx films from O2/HMDSO plasmas.
In: SURFACE & COATINGS TECHNOLOGY, 116, Elsevier Science SA, Switzerland, In: th International Conference on Plasma Surface Engineering (PSE 98), Garmisch-Partenkirchen, GERMANY, SEP 14-18, 1998, pp. 1033-1036, DOI: 10.1016/S0257-8972(99)00092-4,
[Conference or Workshop Item]

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