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Plasma deposition of hard and thermal resistant SiBCN coatings

Hegemann, Dirk and Riedel, R. and Oehr, C. (1999):
Plasma deposition of hard and thermal resistant SiBCN coatings.
In: International Symposium on Plasma Chemistry <1999, Praha>: Proceedings. Hrsg.: M. Hrabovsky, [Conference or Workshop Item]

Item Type: Conference or Workshop Item
Erschienen: 1999
Creators: Hegemann, Dirk and Riedel, R. and Oehr, C.
Title: Plasma deposition of hard and thermal resistant SiBCN coatings
Language: English
Series Name: International Symposium on Plasma Chemistry <1999, Praha>: Proceedings. Hrsg.: M. Hrabovsky
Divisions: 11 Department of Materials and Earth Sciences
11 Department of Materials and Earth Sciences > Material Science
11 Department of Materials and Earth Sciences > Material Science > Dispersive Solids
11 Department of Materials and Earth Sciences > Fachbereich Materialwissenschaft (1999 aufgegangen in 11 Fachbereich Material- und Geowissenschaften)
Date Deposited: 19 Nov 2008 16:23
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