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Number of items: 3.

Zhou, Y. ; Yan, X. ; Kroke, E. ; Riedel, R. ; Probst, D. ; Thissen, A. ; Hauser, R. ; Ahles, M. ; Seggern, H. von (2006):
Deposition Temperature Effect on the Structure and Optical Property of RF-PACVD-Derived Hydrogenated SiCNO Film.
In: Materialwissenschaft und Werkstofftechnik, 37 (2), pp. 173-177. Wiley-VCH Verlag GmbH, Weinheim, ISSN 0933-5137,
DOI: 10.1002/mawe.200600993,
[Article]

Zhou, Y. ; Yan, X. ; Kroke, E. ; Riedel, R. ; Probst, D. ; Thissen, A. ; Hauser, R. ; Ahles, Marcus ; Seggern, Heinz von (2006):
Deposition temperature effect on the structure and optical property of RF-PACVD-derived hydrogenated.
In: Materialwissenschaft und Werkstofftechnik, 37, p. 173. [Article]

Zhou, Y. ; Probst, D. ; Thissen, A. ; Kroke, E. ; Riedel, R. ; Hauser, R. ; Hoche, H. ; Bfroszeit, E. ; Kroll, P. ; Stafast, H. (2006):
Hard Silicon carbonitride films obtained by RF-plasma-enhanced chemical yapour deposition using the single-source precursor bis(trimethylsilyl)carbodiimide.
In: Journal of the European Ceramic Society, 26, pp. 1325-1335. [Article]

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