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Deposition temperature effect on the structure and optical property of RF-PACVD-derived hydrogenated

Zhou, Y. and Yan, X. and Kroke, E. and Riedel, R. and Probst, D. and Thissen, A. and Hauser, R. and Ahles, Marcus and von Seggern, Heinz (2006):
Deposition temperature effect on the structure and optical property of RF-PACVD-derived hydrogenated.
In: Materialwissenschaft und Werkstofftechnik, 37, p. 173. [Article]

Item Type: Article
Erschienen: 2006
Creators: Zhou, Y. and Yan, X. and Kroke, E. and Riedel, R. and Probst, D. and Thissen, A. and Hauser, R. and Ahles, Marcus and von Seggern, Heinz
Title: Deposition temperature effect on the structure and optical property of RF-PACVD-derived hydrogenated
Language: English
Journal or Publication Title: Materialwissenschaft und Werkstofftechnik
Journal volume: 37
Divisions: 11 Department of Materials and Earth Sciences
Date Deposited: 20 Nov 2008 08:25
License: [undefiniert]
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