Zhou, Y. ; Probst, D. ; Thissen, A. ; Kroke, E. ; Riedel, R. ; Hauser, R. ; Hoche, H. ; Bfroszeit, E. ; Kroll, P. ; Stafast, H. (2006)
Hard Silicon carbonitride films obtained by RF-plasma-enhanced chemical yapour deposition using the single-source precursor bis(trimethylsilyl)carbodiimide.
In: Journal of the European Ceramic Society, 26
Artikel, Bibliographie