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Zhou, Y. and Probst, D. and Thissen, A. and Kroke, E. and Riedel, R. and Hauser, R. and Hoche, H. and Bfroszeit, E. and Kroll, P. and Stafast, H. (2006):
Hard Silicon carbonitride films obtained by RF-plasma-enhanced chemical yapour deposition using the single-source precursor bis(trimethylsilyl)carbodiimide.
26, In: Journal of the European Ceramic Society, pp. 1325-1335, [Article]

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