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Number of items: 16.

Article

Staab, Matthias and Greiner, P. F. and Schlosser, Michael and Schlaak, Helmut F. (2011):
Applications of Novel High-Aspect-Ratio Ultrathick UV Photoresist for Microelectroplating.
In: Microelectromechanical Systems, Journal of (JMEMS), (99), IEEE, pp. 1-3, ISSN 1057-7157, [Article]

Gao, J. and Müller, W. F. O. and Greiner, P. F. and Eicher, Dirk and Weiland, T. and Schlaak, Helmut F. (2010):
Combined simulation of micro permanent magnetic linear contactless displacement sensor.
10, In: Sensors 2010, (9), pp. 8424-8436, [Online-Edition: http://www.mdpi.com/1424-8220/10/9/8424/],
[Article]

Conference or Workshop Item

Greiner, P. F. and Schlaak, Helmut F. (2011):
High Aspect Ratio Metal Nano and Micro Pillars as Suspension Elements in MEMS.
In: 9th International Workshop on High Aspect Ratio Micro Structure Technology, HsinChu, Taiwan, 12. Jun. - 18. Jun., pp. 53-54, [Online-Edition: http://www.harmst2011.tw/],
[Conference or Workshop Item]

Greiner, P. F. and Eberhardt, J. and Schlaak, Helmut F. (2010):
Metallic Micro Nails MAde by direct LiG process – MiNiMAL.
In: ANKA/KNMF Joint Users Meeting, 2, Karlsruhe, In: KNMF User Meeting, Karlsruhe, p. 69, [Conference or Workshop Item]

Quednau, Sebastian and Greiner, P. F. and Schlaak, Helmut F. and Rauber, Markus and Ensinger, Wolfgang and Neumann, Reinhard (2010):
Integration von Nanodrahtarrays in Mikrosysteme für die Gasflusssensorik.
In: GMM Fachbericht 63 "Mikro-Nano-Integration", VDE VERLAG GMBH, In: 2. GMM-Workshop "Mikro-Nano-Integration", Erfurt, 3.-4. März 2010, pp. 159-164, ISSN 1432-3419, [Online-Edition: urn:nbn:de:tuda-tuprints-21649],
[Conference or Workshop Item]

Schlaak, Helmut F. and Greiner, P. F. (2009):
Mikro-Integration – Neue Funktionen für Mikrosysteme durch Nanotechnologie.
Berlin, Offenbach, In: 1. GMM-Workshop; GMM Fachbericht 60 "Mikro-Nano-Integration", Seeheim, 12.-13. März 2009, pp. 129-134, [Conference or Workshop Item]

Gao, J. and Müller, W. F. O. and Greiner, P. F. and Eicher, Dirk and Weiland, T. and Schlaak, Helmut F. (2009):
Combined simulation of micro permanent magnetic linear contactless displacement sensor.
In: Book of digests, ISEF 09- XIVth International Symposium on Electromagnetic Fields in Mechatronics Electrical and Electronic Engineering. ARRAS, France, pp. 211-212, [Conference or Workshop Item]

Greiner, P. F. and Schlaak, Helmut F. and Bracht, A. (2009):
Mikro-Nano-Integration - Brücke in die Nanowelt.
In: Mikroproduktion Nr. 5 , Bd. 7, München, pp. 27-29, [Conference or Workshop Item]

Ionescu, E. and Greiner, P. F. and Ngoumeni Yappi, R. B. and Martinez-Crespiera, S. and Schlaak, Helmut F. (2008):
Thermally Conductive SU-8-Composites using Ceramic Nano-Powders.
In: Conference Proceeding Nanofair 2008, Dresden, pp. 205-208, [Conference or Workshop Item]

Ballas, R. G. and Greiner, P. F. and Schlaak, Helmut F. (2006):
Dynamic Admittance Matrix of Piezoelectric Multilayer Beam Bending Actuators in Closed Form Analysis.
In: Actuator 2006 : 10th International Conference on New Actuators & 4th International Exhibition on Smart Actuators and Drive Systems, 14 - 16 June 2006, Bremen, Germany ; conference proceedings ; [in parallel with RoboCup 2006, Service Robotics, KI 2006] /, Bremen, HVG Hanseatische Veranstaltungs-GmbH, [Conference or Workshop Item]

Ballas, R. G. and Greiner, P. F. and Schlaak, Helmut F. (2005):
Non-contact deflection measurements of piezoelectric beam bending actuators with an integrated inductive sensor in combination with a high-accuracy electronic circuit.
Techn. Univ., In: Mikro-System-Technik Chemnitz '05 : Mikromechanik & Mikroelektronik, Technische Universität Chemnitz, 26./27. Oktober 2005, [Conference or Workshop Item]

Ballas, R. G. and Greiner, P. F. and Schlaak, Helmut F. (2005):
Smart piezoelectric bending micro actuator : an integrated inductive non-contact proximity sensor to detect tip deflection.
VDE-Verl., In: Mikrosystemtechnik Kongress 2005, Freiburg , Germany, 10. bis 12. Oktober 2005, [Conference or Workshop Item]

Ballas, R. G. and Greiner, P. F. and Schlaak, Helmut F. (2005):
Deflection measurement of piezoelectric bending actuators with a combination of an integrated non-contact inductive sensor and high-accuracy electronic circuit.
Peter Scharff].- Ilmenau : Verl. ISLE, In: Mechanical engineering from macro to nano : 50. Internationales Wissenschaftliches Kolloquium, Technische Universität Ilmenau, 19. - 23.9.2005, [Conference or Workshop Item]

Ballas, R. G. and Greiner, P. F. and Schlaak, Helmut F. and Schmid, Andreas Joseph (2005):
Bending Actuators with Integrated Capacitive and Inductive Sensors for Deflection Measurement.
In: 7. GMA-Kongress 2005 - Automation als interdisziplinäre Herausforderung, Baden-Baden, Deutschland, 7.8. Juni 2005, pp. 319-326, [Conference or Workshop Item]

Ballas, R. G. and Greiner, P. F. and Schlaak, Helmut F. and Schmid, Andreas Joseph (2005):
Piezoelektrische Biegeaktoren mit integrierter kapazitiver und induktiver Sensorik zur Erfassung der Auslenkung.
In: Automation als interdisziplinäre Herausforderung : GMA-Kongress 2005 ; Kongress Baden-Baden, 7. und 8. Juni 2005 / VDI/VDE-Gesellschaft Mess- und Automatisierungstechnik.- Düsseldorf : VDI-Verl., 2005.- 910 S.- (VDI-Berichte ; 1883).- ISBN: 3-18-091883-, Düsseldorf, VDI-Verl., [Conference or Workshop Item]

Report

Schlaak, Helmut F. and Riedel, Ralf and Völklein, F. and Neumann, R. and Korb, W. and Greiner, P. F. and Ionescu, E. and Rauber, Markus (2008):
Integration und Anwendung von Nano-Drähten durch Mikro-Nano-Fertigung und Mikro-Montage - INANOMIK, FKZ 16SV3555.
In: BMBF Schlussbericht, [Online-Edition: http://edok01.tib.uni-hannover.de/edoks/e01fb10/620972890.pd...],
[Report]

This list was generated on Sat Dec 7 00:38:40 2019 CET.