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High Aspect Ratio Metal Nano and Micro Pillars as Suspension Elements in MEMS

Greiner, P. F. and Schlaak, Helmut F. (2011):
High Aspect Ratio Metal Nano and Micro Pillars as Suspension Elements in MEMS.
In: 9th International Workshop on High Aspect Ratio Micro Structure Technology, HsinChu, Taiwan, 12. Jun. - 18. Jun., [Online-Edition: http://www.harmst2011.tw/],
[Conference or Workshop Item]

Item Type: Conference or Workshop Item
Erschienen: 2011
Creators: Greiner, P. F. and Schlaak, Helmut F.
Title: High Aspect Ratio Metal Nano and Micro Pillars as Suspension Elements in MEMS
Language: English
Divisions: 16 Department of Mechanical Engineering
18 Department of Electrical Engineering and Information Technology
18 Department of Electrical Engineering and Information Technology > Institute for Electromechanical Design > Microtechnology and Electromechanical Systems
18 Department of Electrical Engineering and Information Technology > Institute for Electromechanical Design
Event Title: 9th International Workshop on High Aspect Ratio Micro Structure Technology
Event Location: HsinChu, Taiwan
Event Dates: 12. Jun. - 18. Jun.
Date Deposited: 30 Jun 2011 06:32
Official URL: http://www.harmst2011.tw/
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