TU Darmstadt / ULB / TUbiblio

Smart piezoelectric bending micro actuator : an integrated inductive non-contact proximity sensor to detect tip deflection

Ballas, R. G. and Greiner, P. F. and Schlaak, Helmut F. (2005):
Smart piezoelectric bending micro actuator : an integrated inductive non-contact proximity sensor to detect tip deflection.
VDE-Verl., In: Mikrosystemtechnik Kongress 2005, Freiburg , Germany, 10. bis 12. Oktober 2005, [Conference or Workshop Item]

Item Type: Conference or Workshop Item
Erschienen: 2005
Creators: Ballas, R. G. and Greiner, P. F. and Schlaak, Helmut F.
Title: Smart piezoelectric bending micro actuator : an integrated inductive non-contact proximity sensor to detect tip deflection
Language: German
Publisher: VDE-Verl.
Divisions: 18 Department of Electrical Engineering and Information Technology
18 Department of Electrical Engineering and Information Technology > Institute for Electromechanical Design > Microtechnology and Electromechanical Systems
18 Department of Electrical Engineering and Information Technology > Institute for Electromechanical Design
Event Title: Mikrosystemtechnik Kongress 2005
Event Location: Freiburg , Germany
Event Dates: 10. bis 12. Oktober 2005
Date Deposited: 20 Nov 2008 08:22
Identification Number: ISBN 978-3-8007-2926-5
License: [undefiniert]
Export:
Suche nach Titel in: TUfind oder in Google
Send an inquiry Send an inquiry

Options (only for editors)

View Item View Item