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Mikro-Integration – Neue Funktionen für Mikrosysteme durch Nanotechnologie

Schlaak, Helmut F. and Greiner, P. F. (2009):
Mikro-Integration – Neue Funktionen für Mikrosysteme durch Nanotechnologie.
Berlin, Offenbach, In: 1. GMM-Workshop; GMM Fachbericht 60 "Mikro-Nano-Integration", Seeheim, 12.-13. März 2009, pp. 129-134, [Conference or Workshop Item]

Item Type: Conference or Workshop Item
Erschienen: 2009
Creators: Schlaak, Helmut F. and Greiner, P. F.
Title: Mikro-Integration – Neue Funktionen für Mikrosysteme durch Nanotechnologie
Language: German
Place of Publication: Berlin, Offenbach
Divisions: 18 Department of Electrical Engineering and Information Technology > Institute for Electromechanical Design > Microtechnology and Electromechanical Systems
18 Department of Electrical Engineering and Information Technology > Institute for Electromechanical Design
18 Department of Electrical Engineering and Information Technology
Event Title: 1. GMM-Workshop; GMM Fachbericht 60 "Mikro-Nano-Integration"
Event Location: Seeheim
Event Dates: 12.-13. März 2009
Date Deposited: 04 Oct 2010 12:45
Identification Number: ISBN: 978-3-8007-3155-8
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