TU Darmstadt / ULB / TUbiblio

Non-contact deflection measurements of piezoelectric beam bending actuators with an integrated inductive sensor in combination with a high-accuracy electronic circuit

Ballas, R. G. and Greiner, P. F. and Schlaak, Helmut F. (2005):
Non-contact deflection measurements of piezoelectric beam bending actuators with an integrated inductive sensor in combination with a high-accuracy electronic circuit.
Techn. Univ., In: Mikro-System-Technik Chemnitz '05 : Mikromechanik & Mikroelektronik, Technische Universität Chemnitz, 26./27. Oktober 2005, [Conference or Workshop Item]

Item Type: Conference or Workshop Item
Erschienen: 2005
Creators: Ballas, R. G. and Greiner, P. F. and Schlaak, Helmut F.
Title: Non-contact deflection measurements of piezoelectric beam bending actuators with an integrated inductive sensor in combination with a high-accuracy electronic circuit
Language: English
Publisher: Techn. Univ.
Divisions: 18 Department of Electrical Engineering and Information Technology
18 Department of Electrical Engineering and Information Technology > Institute for Electromechanical Design > Microtechnology and Electromechanical Systems
18 Department of Electrical Engineering and Information Technology > Institute for Electromechanical Design
Event Title: Mikro-System-Technik Chemnitz '05 : Mikromechanik & Mikroelektronik
Event Location: Technische Universität Chemnitz
Event Dates: 26./27. Oktober 2005
Date Deposited: 20 Nov 2008 08:22
License: [undefiniert]
Export:
Suche nach Titel in: TUfind oder in Google
Send an inquiry Send an inquiry

Options (only for editors)

View Item View Item