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Probst, Daniel and Hoche, Holger and Zhou, Yanping and Hauser, Ralf and Stelzner, Thomas and Scheerer, Herbert and Broszeit, Erhard and Berger, Christina and Riedel, Ralf and Stafast, Herbert and Kroke, Edwin (2005):
Development of PE-CVD Si/C/N:H films for tribological and corrosive complex-load conditions.
In: Surface and Coatings Technology, 200 (1-4), pp. 355-359. Elsevier, ISSN 02578972,

Stelzner, Thomas and Arold, M. and Falk, F. and Stafast, Herbert and Probst, Daniel and Hoche, Holger (2005):
Single source precursors for plasma-enhanced CVD of SiCN films, investigated by mass spectrometry.
In: Surface & coatings technology, 200, pp. 372-376. [Article]

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