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Hoffmann, P. S. ; Fainer, N. I. ; Baake, O. ; Kosinova, M. L. ; Rumyantsev, Y. M. ; Trunova, V. A. ; Klein, Andreas ; Pollakowski, B. ; Beckhoff, B. ; Ensinger, W. (2012)
Silicon carbonitride nanolayers - Synthesis and chemical characterization.
In: Thin Solid Films, 520 (18)
doi: 10.1016/j.tsf.2012.04.082
Article, Bibliographie

Baake, O. ; Fainer, N. I. ; Hoffmann, P. S. ; Kosinova, M. L. ; Rumyantsev, Y. M. ; Trunova, V. A. ; Klein, Andreas ; Ensinger, W. ; Pollakowski, B. ; Beckhoff, B. ; Ulm, G. (2009)
Chemical characterization of SiCxNy nanolayers by FTIR-and Raman spectroscopy, XPS and TXRF-NEXAFS.
In: Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 603 (1-2)
doi: 10.1016/j.nima.2009.03.007
Article, Bibliographie

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