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Baake, O. ; Fainer, N. I. ; Hoffmann, P. S. ; Kosinova, M. L. ; Rumyantsev, Y. M. ; Trunova, V. A. ; Klein, Andreas ; Ensinger, W. ; Pollakowski, B. ; Beckhoff, B. ; Ulm, G. (2009)
Chemical characterization of SiCxNy nanolayers by FTIR-and Raman spectroscopy, XPS and TXRF-NEXAFS.
In: Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 603 (1-2)
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