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Number of items: 5.

Ballas, Ruediger ; Schmid, Andreas Joseph ; Schlaak, Helmut F. ; Mössinger, A. ; Meissner, Peter ; Töpfer, U. ; Murmann-Biesenecker, H. ; Munz, G. ; Maichl, M. (2004)
High-accuracy deflection measurement of a piezoelectric beam multilayer actuator with an integrated capacitive strain sensor.
Conference or Workshop Item, Bibliographie

Ballas, Ruediger ; Schmid, Andreas Joseph ; Schlaak, Helmut F. ; Kolb, A. ; Mössinger, A. ; Meissner, Peter ; Töpfer, U. ; Murmann-Biesenecker, H. ; Munz, G. ; Maichl, M. (2004)
High-accuracy sensor electronics for deflection measurement of a piezoelectric bending beam multilayer actuator.
Conference or Workshop Item, Bibliographie

Schmid, J. ; Töpfer, U. ; Murmann-Biesenecker, H. ; Munz, G. ; Münzenmaier, A. ; Maichl, M. ; Ballas, Ruediger ; Schlaak, Helmut F. ; Steinkopff, T. ; Schuh, C. ; Laurent, M. ; Bödinger, H. ; Hoffmann, M. ; Wagner, S. (2004)
Piezoelectric micro actuator with an integrated sensor to control the air flow in a micro valve.
Conference or Workshop Item, Bibliographie

Schmidt, J. ; Töpfer, U. ; Ballas, Ruediger ; Schlaak, Helmut F. ; Munz, G. ; Maichl, M. ; Münzenmaier, A. (2003)
Piezoelectric beam multilayer actuator with an integrated capacitive strain sensor to detect deflection.
Conference or Workshop Item, Bibliographie

Schmid, Andreas Joseph ; Wich, T. ; Fischer, T. ; Töpfer, U. ; Steinkopff, T. ; Schuh, C. ; Weinmann, M. ; Maichl, M. ; Munz, G. ; Hanisch, C. ; Schlaak, Helmut F. ; Ballas, Ruediger ; Hoffmann, M. ; Wagner, S. (2002)
Low voltage piezoelectric actuator with integrated strain gauge : a new technology for industrial automation.
Conference or Workshop Item, Bibliographie

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