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Schmid, J. and Töpfer, U. and Murmann-Biesenecker, H. and Munz, G. and Münzenmaier, A. and Maichl, M. and Ballas, Ruediger and Schlaak, Helmut F. and Steinkopff, T. and Schuh, C. and Laurent, M. and Bödinger, H. and Hoffmann, M. and Wagner, S. (2004):
Piezoelectric micro actuator with an integrated sensor to control the air flow in a micro valve.
Bremen, HVG Hanseatische Veranstaltungs-GmbH, In: Actuator 2004 : conference proceedings ; 14 - 16 June 2004, Bremen, Germany / 9th International Conference on New Actuators & 3rd International Exhibition on Smart Actuators and Drive Systems. Ed.: Hubert Borgmann.- Bremen : HVG Hanseatische Veranstaltung, [Conference or Workshop Item]

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