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Piezoelectric micro actuator with an integrated sensor to control the air flow in a micro valve

Schmid, J. and Töpfer, U. and Murmann-Biesenecker, H. and Munz, G. and Münzenmaier, A. and Maichl, M. and Ballas, Ruediger and Schlaak, Helmut F. and Steinkopff, T. and Schuh, C. and Laurent, M. and Bödinger, H. and Hoffmann, M. and Wagner, S. (2004):
Piezoelectric micro actuator with an integrated sensor to control the air flow in a micro valve.
Bremen, HVG Hanseatische Veranstaltungs-GmbH, In: Actuator 2004 : conference proceedings ; 14 - 16 June 2004, Bremen, Germany / 9th International Conference on New Actuators & 3rd International Exhibition on Smart Actuators and Drive Systems. Ed.: Hubert Borgmann.- Bremen : HVG Hanseatische Veranstaltung, [Conference or Workshop Item]

Item Type: Conference or Workshop Item
Erschienen: 2004
Creators: Schmid, J. and Töpfer, U. and Murmann-Biesenecker, H. and Munz, G. and Münzenmaier, A. and Maichl, M. and Ballas, Ruediger and Schlaak, Helmut F. and Steinkopff, T. and Schuh, C. and Laurent, M. and Bödinger, H. and Hoffmann, M. and Wagner, S.
Title: Piezoelectric micro actuator with an integrated sensor to control the air flow in a micro valve
Language: English
Series Name: Actuator 2004 : conference proceedings ; 14 - 16 June 2004, Bremen, Germany / 9th International Conference on New Actuators & 3rd International Exhibition on Smart Actuators and Drive Systems. Ed.: Hubert Borgmann.- Bremen : HVG Hanseatische Veranstaltung
Place of Publication: Bremen
Publisher: HVG Hanseatische Veranstaltungs-GmbH
Divisions: 18 Department of Electrical Engineering and Information Technology
18 Department of Electrical Engineering and Information Technology > Institute for Electromechanical Design > Microtechnology and Electromechanical Systems
18 Department of Electrical Engineering and Information Technology > Institute for Electromechanical Design
Date Deposited: 20 Nov 2008 08:22
License: [undefiniert]
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