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High-accuracy deflection measurement of a piezoelectric beam multilayer actuator with an integrated capacitive strain sensor

Ballas, Ruediger and Schmid, Andreas Joseph and Schlaak, Helmut F. and Mössinger, A. and Meissner, Peter and Töpfer, U. and Murmann-Biesenecker, H. and Munz, G. and Maichl, M. (2004):
High-accuracy deflection measurement of a piezoelectric beam multilayer actuator with an integrated capacitive strain sensor.
Microtechnology, Mechatronics and Materials, international conference [in connection with] O.M.P. - Opto Micro Products, In: My2M 2004 <1, 2004, Nürnberg>: Proceedings ... - Microtechnology, Mechatronics and Materials : international conference [in connection with] O.M.P. - Opto Micro Products, International Trade Fair for Optical and Microtechnology Products, 25 - 27 May 2004, [Conference or Workshop Item]

Item Type: Conference or Workshop Item
Erschienen: 2004
Creators: Ballas, Ruediger and Schmid, Andreas Joseph and Schlaak, Helmut F. and Mössinger, A. and Meissner, Peter and Töpfer, U. and Murmann-Biesenecker, H. and Munz, G. and Maichl, M.
Title: High-accuracy deflection measurement of a piezoelectric beam multilayer actuator with an integrated capacitive strain sensor
Language: English
Series Name: My2M 2004 <1, 2004, Nürnberg>: Proceedings ... - Microtechnology, Mechatronics and Materials : international conference [in connection with] O.M.P. - Opto Micro Products, International Trade Fair for Optical and Microtechnology Products, 25 - 27 May 2004
Place of Publication: Microtechnology, Mechatronics and Materials
Publisher: international conference [in connection with] O.M.P. - Opto Micro Products
Divisions: 18 Department of Electrical Engineering and Information Technology
18 Department of Electrical Engineering and Information Technology > Institute for Electromechanical Design > Microtechnology and Electromechanical Systems
18 Department of Electrical Engineering and Information Technology > Institute for Electromechanical Design
Date Deposited: 20 Nov 2008 08:22
License: [undefiniert]
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