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Piezoelectric beam multilayer actuator with an integrated capacitive strain sensor to detect deflection

Schmidt, J. and Töpfer, U. and Ballas, Ruediger and Schlaak, Helmut F. and Munz, G. and Maichl, M. and Münzenmaier, A. (2003):
Piezoelectric beam multilayer actuator with an integrated capacitive strain sensor to detect deflection.
Wunstorf, AMA Service Ges., In: SENSOR 2003 : 11th international conference ; 13 - 15 May 2003, Exhibition Centre Nuremberg, Germany ; proceedings / an event of the Association for Sensor Technology, AMA.- Wunstorf : AMA Service Ges., 2003.- S. 279-286, [Conference or Workshop Item]

Item Type: Conference or Workshop Item
Erschienen: 2003
Creators: Schmidt, J. and Töpfer, U. and Ballas, Ruediger and Schlaak, Helmut F. and Munz, G. and Maichl, M. and Münzenmaier, A.
Title: Piezoelectric beam multilayer actuator with an integrated capacitive strain sensor to detect deflection
Language: German
Series Name: SENSOR 2003 : 11th international conference ; 13 - 15 May 2003, Exhibition Centre Nuremberg, Germany ; proceedings / an event of the Association for Sensor Technology, AMA.- Wunstorf : AMA Service Ges., 2003.- S. 279-286
Place of Publication: Wunstorf
Publisher: AMA Service Ges.
Divisions: 18 Department of Electrical Engineering and Information Technology
18 Department of Electrical Engineering and Information Technology > Institute for Electromechanical Design > Microtechnology and Electromechanical Systems
18 Department of Electrical Engineering and Information Technology > Institute for Electromechanical Design
Date Deposited: 20 Nov 2008 08:22
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