Browse by Person
![]() | Up a level |
Lal, K. ; Goswami, N. ; Miao, J. ; Hartnagel, H. L. (1999):
High-resolution X-ray diffraction study of free-standing gallium arsenide coiled membrane force sensors produced by micromachining.
In: Indo-Russian Workshop on Micromechanical Systems = SPIE Proceedings. Vol. 3903 (1999), [Conference or Workshop Item]
Lal, K. ; Goswami, N. ; Miao, J. ; Hartnagel, H. L. (1999):
Structural characterization of free-standing gallium arsenide coiled membranes produced by micromachining.
In: Journal of applied crystallography, 32, [Article]
Mutamba, Kabula ; Sigurdardottir, A. ; Miao, J. ; Dehé, A. ; Aller, ; Hartnagel, H. L. (1996):
Uniaxial stress dependence of AlGaAs/GaAs RTD characteristics for sensor applications.
In: Micromechanics Europe Conference <1996, Barcelona, Spain>: Proceedings. S. 85, [Conference or Workshop Item]