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Structural characterization of free-standing gallium arsenide coiled membranes produced by micromachining

Lal, K. and Goswami, N. and Miao, J. and Hartnagel, H. L. (1999):
Structural characterization of free-standing gallium arsenide coiled membranes produced by micromachining.
In: Journal of applied crystallography, 32, [Article]

Item Type: Article
Erschienen: 1999
Creators: Lal, K. and Goswami, N. and Miao, J. and Hartnagel, H. L.
Title: Structural characterization of free-standing gallium arsenide coiled membranes produced by micromachining
Language: English
Journal or Publication Title: Journal of applied crystallography
Volume: 32
Divisions: 18 Department of Electrical Engineering and Information Technology
18 Department of Electrical Engineering and Information Technology > Microwave Electronics
Date Deposited: 19 Nov 2008 16:05
License: [undefiniert]
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