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Ebene hoch |
1999
Lal, K. ; Goswami, N. ; Miao, J. ; Hartnagel, H. L. (1999)
High-resolution X-ray diffraction study of free-standing gallium arsenide coiled membrane force sensors produced by micromachining.
In: Indo-Russian Workshop on Micromechanical Systems
Buchkapitel, Bibliographie
Lal, K. ; Goswami, N. ; Miao, J. ; Hartnagel, H. L. (1999)
Structural characterization of free-standing gallium arsenide coiled membranes produced by micromachining.
In: Journal of applied crystallography, 32
Artikel, Bibliographie
1996
Mutamba, Kabula ; Sigurdardottir, A. ; Miao, J. ; Dehé, A. ; Aller, I. ; Hartnagel, H. L.
Hrsg.: Morante, J. R. (1996)
Uniaxial stress dependence of AlGaAs/GaAs RTD characteristics for sensor applications.
Micromechanics Europe Conference. Barcelona, Spain (1996)
Konferenzveröffentlichung, Bibliographie